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932 結果が見つかりました: 中古 Wafer Steppers

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  • CANON FPA 5000 ES3

    CANON: FPA 5000 ES3

    Stepper, 8" SMIF (Reticle) Interfaced with TEL Act 8 Reticle size: 6" Mainframe: Operation Controller Main body Back chamber RASCO BCU-900 Temperature control unit 200 V, 3 ø, 40 A CYMER ELS6300 Laser unit 208 V, 50/60 Hz, 60 A ULPA filter I/F Module Tool box Currently stored in a cleanroom 2001 vintage.
  • CANON: FPA 2000 I1

    i-Line Stepper machine, 6" Reticle: 5" Stored in a cleanroom 1991 vintage.
  • ULTRATECH: 1100

    Stepper, 3" - 6" Broadband "G" + "H" line system Resolution: 1.0 microns Alignment: WAS key and target Automation or intelligent autoloader Air probe edge switches HP 362 computer with hard disk 1987 vintage.
  • GCA: 8000I SERIES DSW LASERSTEP 200

    Parts machine without laser or lenses.
  • NIKON: I7

    Steppers, 6".
  • PRECISION / GCA: 19

    Vacuum oven Temperature: 35° - 200°C P/N: 600121259.
  • ULTRATECH: 1500

    Stepper, 6" Currently de-installed 1999 vintage.
  • ULTRATECH: 1500

    Stepper, 6" Currently de-installed 1999 vintage.
  • NIKON NSR 2005 I10C

    NIKON: NSR 2005 I10C

    I-Line stepper, 8" Reticle microscope : Fixed HP LASER : 5517B LSA LASER : 5mW ITV Camera : Nikon original type OF Detection type : Nikon original type Wafer loader type : A1 Wafer carrier table : Left Reticle size : 6inch FIA PD Extension LIB Rack type : Left 1994 vintage.
  • CANON: FPA 3000 EX3

    Stepper 1997 vintage.
  • ULTRATECH: 1700

    Steppers MVS not included Currently crated.
  • NIKON NSR 1505 G6E

    NIKON: NSR 1505 G6E

    Stepper, 5" Resolution: 0.65㎛ D.O.F: range ≥ 1.5 ㎛ Lens distortion: ≤±0.09 ㎛ Focus stability: ≤0.6 ㎛ Wafer flatness: ≤3 ㎛ Uniformity: ≤±2.0% Reticle rotation accuracy: ±0.02 ㎛ Overlay: |X| + 3σ ≤ 0.2㎛ EGA alignment accuracy: |X| + 3σ ≤ 0.14 ㎛ Stepping accuracy: 3σ ≤ 0.09 ㎛ Pre-alignment repeatability: 3σ ≤ 2 5㎛ Utilities: Electrical power: 200V±20 V, 3 Phase, 50 A, 50/60 Hz Air: ≥3 kg/cm2, 5 L/min, 1/4" Vacuum: ≤300 mmHg, 50 L/min, 1/4" PCW: 16°-32°C, ≥3 kg/c, 18 L/min, 1/2" Thermal exhaust: 1000L/min, 125mm Drain: 1".
  • NIKON: NSR-2005I8A

    Stepper, PC model NEST modify : MSC2 Software Version : 2.4D Reticle (5) Size Material : Quartz Thickness : 0.09" Changer type : Multi Wafer (6) Size Standard : JEIDA Orientation flat / Notch : OF Optical system Magnification : ( 1/5 )× Field size : (20.0×20.4mm) NA : ( 0.5 )~( ) Wavelength : i Line Illumination system Illuminant : Mercury lamp Exposure time control : integrating Exposure control Masking function Wafer loader Type : Type Ⅰ Reticle alignment Alignment light : Other(HeNe Laser, halogen lamp ) Type : CCD imaging, image treatment XY stage Type : Linear Motor Drive、triaxial interferometer Stroke : X( 200mm )~( )/Y( 200mm )~( ) Wafer leveling Type : Biaxial linear motor drive TV pre-alignment Type : Image treatment Reticle feeder (14 ) Sheet reticle storage Reticle particle inspection Type : Laser beam Unit name : PD5(Broken) Chamber Cooling type (air cooling) on T/C : S85L T/C Air cooling type : Cooling unit/inner Heater type T/C liquid cooling type : Cooling unit/inner Heater type T/C liquid-temp control unit : Stage Camera Type : CCD FIA LSA Inline : Stand alone 1992 vintage.
  • NIKON: NSR 2005 G8C

    Stepper PC missing Type-1 loader Chamber S810 1996 vintage.
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