中古 NIKON NSR-TFH i14 DL #293689546 を販売中
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ID: 293689546
ウェーハサイズ: 6"
ヴィンテージ: 2008
Stepper, 6"
(2) Cassettes
Left-in-left
Reticle, 6" (normal type)
30-Slots
Barcode reader
Magnification: 1/5 Reduction
Light source: i-Line (365 nm)
Resolution: 0.4 µm
Variable lens: 0.50-0.63
Exposure filed size: 22 mm
SENDAI S25 Air conditioner and temperature controller
HFC-R407C / FC-77 Refrigerant
Control: Bellows
Lens adjust: Micrometer
Reticle microscope: Variable
Alignment sensor: LSA, FIA, TTLFC2
Lamp: 2.5 kW
Multiple focus system
Table leveling
Wafer type: Notch (type 3)
Wafer holder type: Ring
Pre-align type: NC PRE2
No wafer edge exposure
No particle checker
Control rack: Left type
Cable type: Normal
Missing parts:
WL Robot arm
(2) WL3CR PCB
LC Bellows unit
(2) Anti-vibration tables
Hard Disk Drive (HDD) (DKA0, DKA100)
PC Type: HP Alphaserver DS15A
Power supply: 200/208 V, 3 Phase, 50/60 Hz
2008 vintage.
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