中古 NIKON NSR S205C #9260061 を販売中

KrF Scanner, 8" Main lens: Lens type: 4EN3 Magnification: 1/4 Light-source: KRF-Line, 248 nm Resolution: Conv (150 nm) RET (130 nm) Lens: 0.60 ~ 0.75 Exposure filed size: 25 x 33 mm Control and lens adjust system: Inner-MAC System hardware: Computer: DS Type Reticle size: 6" Variable reticle microscope Alignment sensor: Laser Step Alignment (LSA) Field Image Alignment (FIA) No Laser Interferometric Alignment (LIA) Aeial Image Sensor (AIS) ALG-AF Alignment Illumination system: CORE + RET Interferometer system: Wafer stage Reticle stage Focus system: Multi focus (7x7 Point) Leveling system: Multi leveling(7x7 Point) Wafer loader: Type 4 Notch type Wafer size: 8" Wafer cassette: Single cassette Wafer in-line: Left in-line Wafer Pre-Align2 type: Non contact Interface type: ACT 8 Reticle loader: 2-Library / 24-Slot Control rack: Right type No signal tower GIGA G21K2-1 Eximer laser Maximum frequency: 2 KHz BMU Active Temperature Control (ATC) (2) AMP Units: Single NEMA type Chamber: SENDAI S37 ASHAHI N6A-A Temperature (BATC / CATC / LLTC2): 23.0°C Options: No FFU unit LFU Unit Booster regulator: 0.1~1.0 Mpa Overlay data (FIA): X: -3 nm Average Y: 17 nm Average X (3σ): 16 nm Y (3σ): 15 nm Lens inclination data: TFD: 144 nm AST: 33 nm Lens distortion data: X: -12 nm~11 nm Y: -4 nm~8 nm Illumination ID (L-NA / I-NA): Power / Uniformity ID 1 (0.68 / 0.51): 1398 mW / 0.56% ID 3 (0.68 / 0.58): 1485 mW / 1.14% ID 6 (0.60 / 0.45): 1340 mW / 1.276% 2002 vintage.