中古 NIKON NSR 2205 i12C #293752261 を販売中

Stepper, 6" Resolution (NA=0.57): Within 0.45 µm DOF: 0.8 µm Lens Distortion (incl. magnification error): Within ±55 nm Lens Distortion Stability: Within ±20 nm Focus Stability: Within ±0.25 µm Open Frame (Max. Exposure Area): 22.0 mm × 22.0 mm (17.96–25.20) Auto Focus Calibration Repeatability: 3σ ≤ 100 nm Auto Focus Offset Range: Within ±20 µm Lamp Power: 700 mW/cm² Lamp Uniformity: Within 1.5 % Dose Control Accuracy (Integrated Exposure Stability): Within ±1.0 % Reticle Blind: +0.4 mm ~ +0.8 mm Reticle Alignment Accuracy: Absolute value within ±0.02 µm of target value, Repeatability within 0.015 µm LSA Overlay Accuracy: |X| + 3σ ≤ 0.065 µm FIA Overlay Accuracy: |X| + 3σ ≤ 0.065 µm Stepping Accuracy: ±0.04 µm (3σ) Orthogonality: Within ±0.1 sec Wafer Stage Flatness: Within 2.0 µm / 200 mm Chip Leveling: Within 4.8 µrad / 22 mm Wafer Prealignment Repeatability: 3σ within 15 µm Self Measurement Program (Option): Automatic Temperature: 23°C Chamber Type: S20 NA Variable System Reticle Size: 6" (Normal) Reticle Microscope: Fix Max Field Size: 22 mm PPD Reticle Barcode Reader Reticle Loader: Standard (13 Slot) Reticle Case: 6" Standard Pre Alignment Wafer Loader: Type2 Chip Leveling Wafer Carrier Table: Left, Right Alignment Sensor: LSA, FIA Rack Type: Normal (Right) Body‑OP Ruck Cable: 3 m (Normal) No Wafer Edge Exposure Lamp Power: 2 kW (Normal) Illumination: SHRINC3 1997 vintage.