中古 ASML PAS 5500 / 700D #293739917 を販売中

Stepper, 8" Fab section: Lithography CIM: SECS Process: BEOL WTS DONALDSON Filter CYMER Laser C and T Cabinet ACC Unit Transfer former Illumination: 26.0 x 8 mm, <1.4, 0.66 Intensity: >2400, 2453.22 Samos block size: 33 µm, <5.5, 7.64 Dynamic focal: Height of element: -2< x <2, -0.22356 Image tilt ray: -1< x <1, 0.09461 Best focus: -0.06 x <-0.06, -0.014 Overlay: Single machine overlay: X<35: -5.5 nm Y<35: 3.9 nm Lens data: FPD: 0.098 µm AST: 0.061 µm 2000 vintage.