中古 TEL / TOKYO ELECTRON NS 300 #293614676 を販売中

Wafer scrubber, 12" Material: Silicon Utility outlet: Vertical downward Carrier station block Carrier stage height: 900 mm Wafer transport method: Robotics transport method (X, Y, Z, Θ) Sensor placement sensor Presence sensor Mapping sensor Wafer out sensor Load port: Bolts / Light Loader: FOUP Load port lockout pin: FEOL Load port indicator Operator access switch FOUP Type: (25) Wafers Kinematic coupling pin Clamp Fan Filter Unit (FFU) AMHS: SHINKO ELCTRIC OHT I/O Sensor ES Switch terminal block Carrier ID reader Alarm lamp: Red / Blue / Yellow / Green Direct drain Digital manometer exhaust monitor Does not include HDD Scrubber process station: Mechanical chuck Wafer holding method: 6-Pins edge contact method Wafer fixing method: 3-Points grip method Wafer sensor N2 Purge backside liquid contact prevention Acceleration: 100 to 1,000 rpm (100 rpm/s increment) Dual band monitor: Alarm rpm bandwidth, stop rpm bandwidth Alarm / Stop rpm setting range: ±0 to 1,000 rpm Process recipes: 1000 Recipe steps: 100 Process time setting: 0 to 999.9 sec/step (0.1 sec increment) Arm: Brush and spray PVA and PP Brush Atomized spray nozzle Flow range: 100 L/min Basic setting: 0.2 L/min (2) Side rinse nozzles ENTEGRIS DIW Filter Rinse nozzle purge method: Slow leak ULPA Filter Rotation speed: CH2-1, CH2-2: 0, 10 to 3,000 rpm (1 rpm increment) CH2-3, CH2-4: 0, 10 to 4,000 rpm (1 rpm increment) AC Power box: Round terminal for main breaker Voltage: 208 V Option: CCD Camera Spinner internal lighting 2006 vintage.