中古 OKAMOTO GNX 300P #9135924 を販売中

Back grinder, 8"-12" Grinding mode: Continuous down feed Grinding spindle: (2) Axes Rotation speed: 3,000 RPM Maximum Bearing: Air bearing Motor: 5.5 kW Built-in motor Cooling method: Water cooled 4" Maximum vertical stroke Vertical fast-grind speed: 8" Per minute Grinding speed: 1 to 999 µm Per minute 12" Grinder diameter Grinding resistance reading: Monitoring current, output to CRT Horizontal angle adjustment: Manual Maximum radial load capacity: 30 kgf Maximum axial load capacity: 150 kgf Air consumption: (2) 20 L Per minute Index table: (3) Vacuum chucks Vacuum chuck material: Porous ceramic Vacuum chuck rotation motor: (3) 1.0 kW AC Servo motor Vacuum chuck rotation speed: 400 RPM Maximum Chuck bearing: Air bearing Maximum radial load capacity: 30 kgf Maximum axial load capacity: 150 kgf Air consumption: (3) 36 L Per minute Auto measuring device: Wafer thickness measurement method: Two-point in-process gauge Wafer thickness setting method: Final Wafer thickness displaying range: 1.8 mm Table cleaning unit: Cleaning method: Water and ceramic ring Wafer cleaning unit: Cleaning method: Water and brush Operation panel: Display method: 15" TFT Color touch panel Air supply: Consumption: 160 NL Per minute Pressure: 0.49 to 0.78 MPa Dew point: -15°C or Lower Oil removal rate: 0.1 PPM W / W Grinding water: Water used: DI Water Pressure: 0.34 to 0.49 MPa Flow rate: 10 L Per wafer Cooling water for vacuum pumps and spindles: Water used: City water Pressure: 0.19 to 0.49 MPa Flow rate: 10 NL Per minute Mist separator duct / General exhaust: Exhaust rate: 2 m³ Per minute Connection: Duct hose 4" Outer diameter Vacuum pump duct / General exhaust: Exhaust rate: 75/90 mA3 / h, 50 / 60 Hz Connection: Duct hose 4" Outer diameter Power consumption: 20 kVA Grounding: Ground resistance JIS type 3 100 ohms or lower Power supply: Input power: 200 V +/- 10% 3 Phase 50 / 60 Hz.