中古 OKAMOTO GNX 300 #9146480 を販売中

Back grinder, 8"-12" Grinding mode : Continuous down feed Grinding spindle : 2 axes Rotation speed : 3,000 rpm maximum Air bearing Motor : 5.5 kW built-in motor Cooling method : Water-cooled Maximum vertical stroke : 4" Vertical fast-grind speed : 8" per minute Grinding speed : 1 to 999 um per minute Grinder diameter : 12" Grinding resistance reading : Monitoring current, output to CRT Horizontal angle adjustment : Manual Maximum radial load capacity : 30 kgf Maximum axial load capacity : 150 kgf Air consumption : 20 L per minute x 2 Index table : (3) Vacuum chucks Vacuum chuck materia l: Porous ceramic Vacuum chuck rotation motor : 1.0 kW AC servo motor x 3 Vacuum chuck rotation speed : 400 rpm maximum Chuck bearing : Air bearing Maximum radial load capacity : 30 kgf Maximum axial load capacity : 150 kgf Air consumption : 36 L per minute x 3 Auto measuring device : Wafer thickness measurement method : Two-point in-process gauge Wafer thickness setting method : Final Wafer thickness displaying range : 1.8 mm Display method : 15" TFT Color touch panel Power supply : Input power : 200V +/- 10%, 3 phase, 50 / 60 Hz Power consumption : 20 kVA Grounding : Ground resistance JIS type 3 100 ohms or lower Air supply : Consumption : 160 NL per minute Pressure : 0.49 to 0.78 MPa Dew point : -15°C or lower Oil removal rate : 0.1 PPM W / W Grinding water : Water used : DI water Pressure : 0.34 to 0.49 MPa Flow rate : 10 L per wafer Cooling water for vacuum pumps and spindles: Pressure : 0.19 to 0.49 MPa Flow rate : 10 NL per minute Mist separator duct / general exhaust: Connection : Duct hose, 4" outer diameter Vacuum pump duct / general exhaust : Connection : Duct hose, 4" outer diameter 2001 vintage.