中古 EBARA Frex 300 #9212102 を販売中
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ID: 9212102
CMP System
Qty Part description
(1) Cl1-l drain pipe
(1) Cl1-r drain pipe
(1) Cl2-r drain pipe
(1) Sponge holder assy (c)
(1) Sponge holder assy (d)
(4) Rubber seats
(4) Cross recessed head machine screws m2x8
(8) Cross recessed head screws m3x8
(4) Cross-recessed head screws m3x8
(4) Cross recessed head screws m3x8
(12) Cross recessed head screws m3x10
(14) Cross recessed head screws m3x16
(8) Cross recessed head screws m3x20
(4) Cross-recessed machine head screws m3x30
(4) Cross-recessed head screws m4x8
(4) Cross recessed head screws m4x10
(10) Cross recessed head screws m4x12
(6) Cross recessed head screws m4x15
(4) Cross recessed head screws m4x16
(6) Cross recessed head screws m4x25
(8) Cross recessed head screws m5x16
(4) Cross recessed head screws m6x15
(4) Cross recessed machine head screws m3x6
(8) Cross recessed head screws m3x8
(18) Cross recessed head screws m4x8
(3) Cross recessed head machine screws m4x10
(2) Hexagon socket headless set screws m3x5
(1) Hexagon socket set screw m4x10
(1) Hexagon socket headless set screw m5x6
(12) Cross hole truss small screws m3x4
(12) Cross recessed truss head screws m3x6
(14) Cross recessed truss head screws m3x10
(17) Cross-recessed truss head screws m4x6
(4) Cross recessed truss head screws m4x8
(20) Cross recessed truss head screws m4x10
(8) Cross recessed truss head screws m5x8
(9) Cross recessed truss head screws m5x10
(1) Joint bolt, roll
(8) Hexagon socket head cap screws m3x4
(9) Hexagon socket head cap screws m3x8
(12) Hexagonagon socket head cap screws m3x10
(1) Hexagon socket head cap screw m3x16
(6) Hexagon socket head cap screws m3x20
(2) Hexagon socket head cap screws m3x25
(4) Hexagon socket head cap screws m4x6
(22) Hexagon socket head cap screws m4x8
(11) Hexagon socket head cap screws m4x10
(4) Hexagon socket head cap screws m4x12
(24) Hexagon socket head cap screws m4x16
(1) Hexagon socket head cap screw m4x25
(8) Hexagon socket head cap screw m5x8
(2) Hexagon socket head cap screw m5x14
(32) Hexagon socket head cap screw m5x16
(2) Hexagon socket head cap screw m5x25
(3) Hexagon socket head cap screw m6x10
(14) Hexagon socket head cap screw m6x20
(4) Hexagon head bolt m4x10
(10) Hexagon head bolt m4x25
(2) Hexagon head bolt m5x10
(2) Hexagon head bolt m6x30
(3) Sp bolt
(1) Nut, cleaning arm (d)
(1) Nut, cleaning arm (c)
(2) Plate nut 300
(22) Plain washer m3
(35) Plain washer m4
(32) Plain washer m5
(1) Washer
(2) Weight case washer
(1) Washer
(2) Spring pin
(2) Spring pin 3x8
(2) Spring pin 4x12
(2) Pivot shaft
(1) Shaft
(1) Shaft, roll
(1) Parallel key 3x3x10
(1) Coupling
(2) Ball bearing
(1) Bearing ss6800zz
(4) Ceramic bearing, 6800
(2) Beariing (7000st)
(1) Timing belt
(2) Spring, nozzle, roll
(3) Spring
(2) O-ring p12
(1) O-ring p20
(1) O-ring g730
(12) O-ring s4
(5) O-ring s7
(2) O-ring s16
(1) O-ring s20
(2) O-ring s22
(1) O-ring s32
(1) O-ring s75
(1) O-ring s95
(1) O-ring s270
(1) O-ring s290
(3) O-ring as568a-216
(1) O-ring as568-#022
(1) Gasket, cover
(2) Gasket, d pan
(1) Seal assy
(1) Balance weight (ur)
(1) Cylinder
(1) Cylinder
(2) Handle
(2) Center nozzle
(4) Nozzle
(3) Latch
(3) Air cylinder
(1) Pfa tube
(1) Soft nylon tube
(4) Pliant tube (2)
(1) Joint (j) drain
(2) Pfa tube (4x3)
(5) Pvc saddle
(3) Ts-saddle 20a
(1) Reducing union tee adapter
(1) Piping adapter set
(2) Piping adapter l type
(4) Elbow union
(1) Elbow union
(1) Male elbow
(6) Union elbow
(8) Union elbow
(6) Union elbow
(8) Union elbow
(8) Reducing union elbow
(1) Quick connector socket
(1) Male branch tee
(1) Plug
(13) Plug
(12) Plug, seal retainer, w.r.
(2) Union
(1) Reducing union
(8) Half union
(1) Tube flange
(1) Flange (1), bellows
(1) Flange (2) bellows
(1) Air operated valve
(1) Air operated valve
(1) Block manifold (l)
(4) Speed control
(3) Regulator
(2) Regulator
(4) Block (2)
(1) Chuck arm (1)
(1) Chuck arm (2)
(1) Arm, ur
(2) Guide (1)
(1) Front cover (upper) 300
(1) Protector frame (l1)
(1) Bearing cover
(1) Belt cover
(1) Cable cover
(1) Cover, arm, ur
(2) Collar, brg (d10x5), rol.
(2) Collar, brg (d19x5), rol.
(1) Collar
(1) Collar, roll
(1) Collar, spd
(1) Cap
(1) Sco cap
(1) Bearing clamp
(1) Connector clamp
(3) Tube, clamp, drain
(1) Bearing case (1)
(1) Bearing case (2)
(1) Case, center nozzle, ur
(4) Chuck piece
(4) Saddle, tube and cable, catm
(3) Saddle, tube, arm
(2) Support, center nozzle, roll
(1) Pipe support (l)
(3) Hose support, chem
(2) Sco shim
(2) Sco shim
(2) Sco shim
(2) Sco shim
(1) Bellows, upper roll
(1) Block stage
(2) Stopper
(1) Plate, washer, arm
(4) Daistad
(1) Table assy
(1) Drain pan (j)
(2) Dry hand (1) 300
(1) Bracket
(1) Bracket (1) r
(3) Bracket (1)
(2) Weight case bracket
(1) Shaft bracket, ur
(1) Flange, seal, roll
(1) Motor bracket
(1) D/r plate
(2) Seal plate l1
(1) Seal plate l2-r
(1) Seal plate l2-l
(1) Plate, chem
(1) Sco plate
(1) Rod block
(1) Pipe block
(1) Base, loadcell, ur
(2) Holder, center nozzle, roll
(1) Holder (1), motor bracket
(4) Tube holder chem
(2) Holder, cable, arm
(1) Holder, seal, roll
(1) Rod end
(3) Sp washer
(1) Drive center
(2) Clip (ar19)
(2) Clip (wr10)
(6) Joiner set
(1) Pivot channel
(1) Screw, cleaning arm (d)
(1) Screw, cleaning arm (c)
(1) Tvme 3903v
(1) Tvme 3902v
(2) Uniwire board
(1) Amplifier
(1) Driver, sgdm-01bda
(1) Vacuum sensor amp
(1) Driver, sgdm-08ada
(1) Ac servo
(2) Controller mc001-tk
(1) Pressure sensor
(1) Fiber unit
(1) Power unit, digital epw-002
(1) Driver, asd13c-a
(1) Driver, asd13c-a
(2) Driver, asd13a-a
(1) Ac servo motor
(1) Ac servo motor
(1) Uni wire end unit
(1) Digital pressure monitor
(1) Load cell
(1) Flow meter
(1) Power terminal
(2) D/a converter
(1) Sticker
(1) Sticker
(2) Lamp, fluorescent, polisher
(1) Lamp, fluorescent, mini enviornment
(2) Glow lamp igniter
(2) Lamp, fluorescent, cleaner
Pins and connectors:
(100) / Connector pins (m) awg 26-20
(100) / Connector pins (m) awg 20-16
(100) / Connector pins (f) awg 26-20
(100) / Connector pins (f) awg 20-16
(20) 2 Pins, receptacle, elr-02v
(16) 3 Pins, receptacle, elr-03v
(20) 4 Pins, receptacle,elr-04v
(6) 6 Pins, receptacle, elr-06v
(24) 2 Pins, receptacle, elp-02v
(16) 3 Pins, receptacle, elp-03v
(20) 4 Pins, receptacle,elp-04v
(6) 6 Pins, receptacle, elp-06v.
EBARA Frex 300は、半導体ウェーハの仕上げと研磨に使用される自動ウェーハ研削、ラッピング、研磨装置です。高精度、再現性を提供するように設計されており、研究開発室での使用に適しています。EBARA FREX-300は平らなウェーハのラッピングおよび磨くことのための精密機械です。平らなワークピースベッドを0-45度から斜めに配置しているため、サンプルのサイズに応じて水平または垂直に加工することができます。この機械はまた、均一で均一な処理を保証するために、独自の2位置ダブルマイクロラッピング/研磨プレートシステムを利用しています。また、処理中のサンプルの動きを防ぐために、デジタル制御されたin-situサンプルホルダーを備えています。F-REX300は適用範囲が広く、安全で、正確な操作のために設計されています。研削、ラッピング、研磨を含むプロセスパラメータの合計10の制御機能を備えています。さらに、このユニットは、プロセス中のパフォーマンスパラメータのデータ取得および分析のためのデータ処理プラットフォームに接続されています。EBARA F-REX300には、全自動サンプルハンドリングマシンもあります。これは、コンピュータ制御可動ローダーを備えており、最小の監督とユーザーの介入でサンプルを機械からロードおよびアンロードすることができます。ウェーハをローダーとの間で移動させるための試料搬送ツールも提供されています。FREX-300は表面の等方的な磨くことを保障するために1µmの粗さの偏差の最高の信頼できる結果を提供するように設計されています。それは軽い粉砕からの光沢の高い磨くことへの異なったポーランドの指定のいろいろな材料を、処理できます。さらに、F-REX 300は、ダイヤモンド研磨やエッチングなどの標準的なウェーハ加工システムと容易に統合できます。これにより、研究開発および生産環境に最適なソリューションとなります。EBARAはまた、マシンのライフサイクルとメンテナンスサービスを提供し、Frex 300が最適なサービスを維持することを保証します。
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