中古 DISCO DFG 82IF/8 #9374771 を販売中

Grinder, 8" Grinding method: In-feed grinding with wafer rotation Operating modes: Fully-automatic mode and manual mode Spindle system: Air spindle: 2-Axes (Single-spindle version selectable) Direct drive high-frequency motor: 4.2 kW 1000-7000 RPM Revolving speed / Electrical current real-time display function incorporated Vertical stroke: 100 mm Vertical in-feed speed range: 0.0001 to 5.000 mm / Sec Vertical rapid feed speed: 600 mm / min Maximum step of vertical displacement: 0.001 mm Minimum vertical resolution: 0.05 µm Angle adjustment: X / Y-Axis direction tilting mechanisms in the spindle housing Height gauge: Measurement range: 0-1000 µm Resolution: 0.5 µm Accuracy: 1 µm Turntable: Diameter: 500 mm Index angle: 180° Reversible (2) Tables Wafer chuck table: Type: Porous Chucking method: Vacuum chucking Revolving speed: 1-500 RPM Applicable wafer size diameter: 8" (2) Chuck tables per turntable Settings for dwell after grind: 0-100 Revolutions Chuck table cleaning: Back-flushing of water and compressed air is combined With scrubbing by brush and oilstone Grinding wheel: Diamond wheel, 8" Wafer loading / Unloading: Wafer carrier storage quantity: (2) Carriers parallel (Loader and unloader) Spinner table: Water cleaning plus drying of both sides Throughput: 60 Wafers / hr Wafer size: 6" Grinding depth: 20 µm Accuracy: Parallelism (TTV): 0.003 mm Thickness variation between wafers: ±0.003 mm Operating control: Nonglare monitor: 12" CRT Illumination color: White Operation panel: Composed of function keys Numeric keys Auxiliary keys Cursor keys Operating controls Manual keyboard: Used for manual operations in which minute manipulation (3) Relocated places: Center / Loader / Unloader (13) Grinding / Cleaning water supply unit (Waste method type): Tank capacity: 401 L (10.6 gal) Water flow rate: 30 L/min (7.9 GPM) Pressure: 3 kgf/cm² (42.6 PSI) Filter: 5 µm Water: Deionized water Vacuum pump unit: Air exhaust rate: 370/450 e/min (50/60 Hz at 160 Torr) Pressure: 25 Torr Motor rating: 1.5 kW Water consumption rate: 5 L/min (1.32 GPM) Water quality: City water Alarm signal tower Colors: Green, orange, red PC Output interface: Data transmission mode: Full duplex ASCII / JIS Codes Data format: Start-stop system Data rate: 4800 baud Data signaling format: EIA RS-232C Air pressure: 5.0 kgf/cm².G - 8.0 kgf/cm².G 71 psi.G - 113.6 psi.G Pressure variation range: 0.3 kgf/cm².G (4.26 psi-G) or less Blade hose: 15x22 mm Flow rate: 500 N/min Dew point: -15°C or Lower Residual oil contents: 0.1 ppm wt/wt Ground resistance: Class 3, 100Ω or less Noise: 1000 V or Less at a pulse width of 500 NS (Square wave) Dual-spindle version: 17 kVA Power supply: 200 VAC ±10%, 3-Phase, 50/60 Hz. 1995 vintage.