中古 AMAT / APPLIED MATERIALS Reflexion 3600 #293758301 を販売中

CMP Systems, 12" (4) FI Load ports Wafer shape: Notch Heater lamp MESA cleaner type 25-Wafer FOUP Platen 1, 2, 3: Type: Pad platen (PFA Coated platen) Pad: IC 1010 Endpoint (ISRM): Motor torque / Full scan / ISCAN Pad conditioner: Screw type disc Polisher options: Polishing head: Profiler heads Upper pneumatics assembly: 4 Port UPA Skins for polisher: Clear windows Pad wafer loss sensor: Dark pad sensor KAWASAKI Wet robot Slurry delivery: Slurry delivery system: 2 Slurries pump type Slurry Dispense Arm: Fixed Cleaner options: Delivery Tank: Mega Sonics Delivery Type: Pressurized Scrubber module 1: Brush type: Taxwise PVA Delivery type: Pressurized low flow Scrubber module 2: Brush type: Taxwise PVA Delivery type: Pressurized low flow Power supply: 200-230 V, 30mA, 50/60 Hz.