中古 ULVAC EI-5 #293690584 を販売中
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ID: 293690584
ヴィンテージ: 2018
E-Beam evaporator
Batch type
Rough pump
Compressor
Evaporation source: EGL-35M EB-Gun
HEARTH 40CC
(3) HEARTH 10CC
HPS-1000N-100 Vapor deposition power supply
Deposition controller: CRTM-9200
Exhaust system:
CRYO-U16P Cryo pump
C30VR Cryo compressor
LR90 Auxiliary pump / dry pump
Vacuum gauge:
SH2-1 Ionization vacuum gauge
G-TRAN Pirani vacuum gauge
Operation system: PLC and PC control
Touch panel operation
2018 vintage.
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