中古 ALCATEL / ADIXEN / PFEIFFER SCM 650 #9258696 販売用

ID#: 9258696

モデル:

SCM 650

カテゴリー:

SPUTTERING SYSTEMS

機器の詳細:

Sputtering system
RF/DC Sputtering
Ionic cleaning
Cathodes: (2) Magnetron targets, 8"
Substrate transport load lock: 6" Diameter substrates

Substrate holder:
(4) Stations
(6) Indexed positions
(4) Transfers with (2) sputtering positions
Rotation: 1 to 30 rpm
Vertical translation: 50 to 100 mm
Shutter: 1 3/4 Automatic shutter

Generators:
RF Generator (2000W For the targets 1 and 2 and substrate holder)
DC Generator (3000W For the targets 1 and 2 Gas lines (2) Lines).
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