中古 DISCO DFL 7161 #9220486 を販売中

Fully automatic laser saw (3) Chucks table, 6" Field of application: Germanium wafer Process chamber (Glass) Coating and spinner (Porous) Configured for cutting semiconductor substrates Running hours: 383 Standby hours: 30,640 Laser head hours: 3743 Laser: COHERENT AVIA 355-28 Power curve Type-K with BSS4 Optical system Head hours: 3,743 Nozzle: K-02 Pulse: ~30 ns 28 W of 355 nm at 110 kHz E-Beam Perm align solder-bonded optics technology Aluminum-Free Active Area (AAA) (Diode material) Field replaceable pump diode modules Smart power supply with RS-232 interface Pulse control system HGX UV Generation technology ThermEQ For uniform pulse energy across a burst of pulses PulseEQ For locked pulse energy across a range of pulse repetition rates PulseTrack For on-the-fly pulse energy control Wavelength: 354.7 nm Average output power: 26 W at 90 kHz 28 W at 110 kHz 23 W at 150 kHz 18 W at 180 kHz Nominal repetition rate: 110 kHz Beam optimization: 110 kHz Motorized crystal shifter: 75 Spots/300 hours Pulse repetition rate single-shot: 300 kHz Pulse-to-pulse stability (Up to 140 kHz): <5% (1σ rms) Average power stability (Over 8 hours): <2% (2σ rms) Polarization ratio²: >100:1 Horizontal Spatial mode²: TEM00 (M2 <1.3) Beam divergence full angle²: (mrad): <0.3 Pulse width: <40 ns Up to 110 kHz Beam pointing drift³: <25°C/μrad Near-field pointing and rep. rate with posilock: 50 μm 1/e² Beam diameter²: 3.5 ±0.35 mm Beam circularity: >85% Warm-up time: Standby mode: <15 Minutes Cold: <40 Minutes Bore-sight accuracy: ±0.5 mm and ±5 mrad RoHS Compliant Utility: Single phase operating voltage: 100 to 240 VAC (Auto ranging) Line frequency: 50/60 Hz (Auto ranging) Laser power consumption: 900 W, 1.7 kW Maximum Missing housing components: LPAC-022222-1 Cover (R, F) (2) LPAC-022223-3 Covers (R, B-R) LPAC-022151-2 Cover (F, L) 2011 vintage.