中古 HITACHI S-9220 #293676208 を販売中

Scanning Electron Microscope (SEM), 8" Standard layout Cursor and line profile method Measuring range: 0.1μm ～2.0μm Length measurement: ± 1% or 3nm Continuous measurement: 56 wafers / hour Secondary electron image resolution: 3nm Image magnification: SEM image: 1000 x 300,000 Optical microscope image: 110 times Automatic measurement and manual measurement Stage: Movement range: X and Y: 0-200mm Stage drive: Pulse motor X, Y axis drive speed: 100 mm/s Loader system: Cassette to loader chamber Loader chamber to stage Wafer transfer robot (2) Cassettes Wafer detection in cassette Vacuum chucking method Orientation flat with notch detection Electron optics Accelerating voltage: 500 to 1600V Electromagnetic lens and booster stock lens Scintillator and photomultiplier detector using EXB filter SE and BSE Stage methods Objective lens diaphragam: Heating thin film movable pattern 2-Stage electromagnetic type (X, Y axes) Astigmatism: 8-Pole electromagnetic system (X, Y) Faraday cup incorporated with auto measurement Optical microscope: 1.2 mm square visual field with black and white CCD camera Control and display system: Viewing control CRT: EWS 21-inch Scanning modes: TV scan, auto brightness and contrast function Image process: Software processing using filtering Safety device: Equipped with emergency off switch Length measurement data processing system: Storage media: 9G byte hard disk, 3.5 magneto-optic disk, 3.5 floppy disk Data process function: statistics scanning using worksheet system Printout: 80-character thermal printer Vacuum exhaust system: (3) Ion pumps (2) Turbo molecular pumps (2) Dry pumps Safety functions: Power outage AIR pressure drop Cooling water flow drop Dynamic valve closing function Pump stop function 2009 vintage.