中古 HITACHI S-8840 #139927 を販売中

CD SEM, 8" Upgraded to 3" to 8" wafer capability CD measuring size: 130-160nm, consistently Version 11.7 S/W or newer SECS/GEM Communication Interface Additional hard disk drive (>1GB) VRT board w/ 8 mb of memory DSP compatible conductive wafer holder Hitachi Hi Tech Electron Gun Accelerating voltage, 500V to 1300V, 10V steps Probe current, 1-16pA at 800V, 1-10pA at 1000V, 1-13pA at 1300V 3 Stage Electromagnetic Lens System Objective Lens: 4 opening click stop, heated aperture is selectable/adjustable outside the vacuum system 2-Stage Deflection Scan Coil Astigmatism correction via an 8-pole electromagnetic coil Magnification = 1000x to >150000x Field control method ; Continuously on for sample decharging, at all voltages Wafer imaging ability; Entire surface of 8"" wafer Depth of focus: >= 1.0mm at 80000x magnification Resolution: < 8nm at 700V - 1000V (or < 6nm with optional retarding voltage), < 6nm at 1000V - 1300V Retarding voltage: Optional at <= 800V for improved resolution Hitachi Probe Tip Optical Microscope System: Image is Monochrome, using CCD camera, Magnification is 110x, Wafer imaging X & Y coverage from 5-195mm , notch down Dual XY Hitachi Microscale Workstation, HP B180L Error Tracking Software Multipoint Measurement Function Edge Roughness Function Contact Hole Measurement Function Automated Image Archiving Function Ergonomic Cassette Flipper Option (2 flippers - one per load port) Operations Manual and Documentation.