中古 AMAT / APPLIED MATERIALS VANTAGE RADOX #9211114 を販売中

Rapid thermal processing system, 12" Dual arm track robot edge grip Control system features: 32-bit Micrprocessor control Process parameter / Wafer history storage Self diagnostics Automated service routines / Host computer interface Factory interface with (2) load ports, wafer mapping capability System EMO with turn-to-release button System water leak and smoke detectors OHT WIP Delivery Docked E99 reading capability Enhanced 25 wafer FOUP Docking flange shield Upper E84 interface enabled OHT Upper E84 sensors and cables Hermos with RF E99 carrier ID Operator access switch Light curtain 4 Color configurable light tower (Front and rear) LOTO Capability to lock out: CDA to all slit valves ISO Valves Pneumatic doors All gas / Liquid final valves Heater power (2) Operator interface CRT monitors: Bay side (Through the wall flat panel with keyboard) Plenum side (Flat panel with keyboard on stand & 25ft cable) Diagnostic Lamp head pump (RadOx chamber only) Chamber pump (RadOx chamber only) Lateral grain edge ring Position A RTP radiance plus ATM vantage (V350): Chamber A gas panel: Gas MFC Size N/O N2 50SLM Hi O2 50SLM Lo O2 5SLM He 30SLM N2 50SLM N2 1sccm N2 100SLM H2 20SLM H2 1SLM Chamber B gas panel Gas MFC Size N/O N2 50SLM Hi O2 50SLM Lo O2 5SLM He 30SLM N2 50SLM N2 1sccm N2 100SLM H2 20SLM H2 1SLM 2007 vintage.