中古 EATON NOVA / AXCELIS Spare parts for NV 6200 #293664891 を販売中

Qty / Part number / Description (1) / - / Accel column (1) / 0342-0721-4001 / PCB, Programmable counter mod (1) / 0342-0441-4001 / PCB, A/D Converter (1) / 0342-0770-1001 / PCB, A/D Mod assembly (2) / 0342-0161-0001 / PCB, Accellerator status (1) / 0342-0413-0001 / PCB, Beam current amplifier (1) / 0342-0138-4001 / PCB, Beam current display driver (3) / 0342-0408-4002 / PCB, Beam current integrator (2) / 0342-0049-0001 / PCB, Chamber vacuum control (1) / 0342-0050-0001 / PCB, Condition monitor (1) / 0342-1013-4001 / PCB, End station MPU (1) / 0342-1077-0001 / PCB, End station vacuum cont interface (1) / 44A2AABL / PCB, Extender, 44-Pins (1) / 100257 / PCB, Extender, 56-Pins (1) / 100028 / PCB, Extender, 72-Pins (1) / CE 454-8 REV D / PCB, Extenter, 56-Pins, 4.5x6.5 (1) / 0342-1054-0001 / PCB, Front panel I/O Card assembly (1) / 0342-1050-0001 / PCB, Horizontal scan genrator (1) / 0342-0576-0001 / PCB, HVPS Control (2) / 0342-0684-0001 / PCB, I/O Card ack interface (2) / 0342-0160-0001 / PCB, I/O Relay driver (2) / 0342-0156-0001 / PCB, I/O Status display (2) / 0342-0158-0001 / PCB, I/O Switch interface (1) / 0342-0442-4001 / PCB, Indexer isolation (1) / 0342-0977-4001 / PCB, Input output (1) / 0342-0771-3001 / PCB, Interface mod assembly (1) / 0342-1033-4001 / PCB, Isolator buffer assembly (1) / 0342-0436-4001 / PCB, Load indexer (1) / 0342-0906-0001 / PCB, Magnet terminal data link (1) / 0342-0450-4001 / PCB, Memory 3200 Series (1) / 0342-0772-3001 / PCB, MPU Mod assembly (1) / 0342-1053-0001 / PCB, Multi-function card assembly (1) / 0342-1000-4001 / PCB, Power I/O Assembly (1) / 0342-0668-0001 / PCB, Printer inter (1) / 0342-0139-4002 / PCB, Process control (1) / 0342-0720-4001 / PCB, Programmable counter mod (1) / 0342-1051-0001 / PCB, Scan clock assembly (3) / 0342-1052-0001 / PCB, Scan system card assembly (1) / 0342-0433-4001 / PCB, Solenoid interface (1) / 0342-0910-4002 / PCB, Source gas servo amplifier (2) / 0342-0922-0001 / PCB, Stepper motor control (1) / 0342-0175-0001 / PCB, System alarm (1) / 0342-0679-0001 / PCB, System monitor interface (1) / 0342-0445-4001 / PCB, Thermocouple AMP (1) / 0342-0458-4001 / PCB, Unload station (1) / 0342-1049-0001 / PCB, Vertical scan generator (1) / 0342-0459-4001 / PCD, ES Interface (1) / 110-009-040 / Belt, E.S. Drive (4) / 110-009-072 / Belts, E.S. Drive (5) / 110-012-051 / Belts, E.S. Drive (1) / 110-004-081 / Belt, Index drive (4) / 0483-0003-0001 / Belts, timing (1) / - / Comair exhaust fan mod Cl2T2 (1) / - / DI Water cooling kit (2) / 0342-1361-0001 / Feedthrus, Scan plate coaxial (1) / 1990-0001-0001 / Filter, Line 1 Amp (2) / 110-003-017 / Insulators, Bushing pivot (2) / 110-003-062 / Insulators, Bottom (12) / 4270-0001-0005 / Lamps, 6.3 V, 20 A (1) / - / Mixed bag (2) / 5400-0001-1209 / O-Rings, Buna N.62 ID (1) / 100-008-011 / O-Ring, Chamber lid (1) / 5990-0097-0001 / PCB, Beam current 4 AMP (3) / 0342-0601-4001 / PCB, Filament power supply control (1) / 0342-1027-0002 / PCB, High current motor drive (2) / 0342-0254-0001 / PCB, Magnet power supply regulator (1) / 0342-1184-0001 / PCB, Scan power driver assembly (1) / 0342-0918-0001 / PCB, Terminal control processor (3) / 7103-0010-2001 / Shield heats (23) / 7230-0027-1001 / Standoffs, Soure supp (3) / 7293-0009-0001 / Switchs, Mercury tilt (1) / 7332-0021-0001 / Tape, SOL, SLC, Acrylic, Red, 1-32" (1) / - / Process cooling water pump (1) / - / Beam inspection tube for beam alignment (2) / 3850-1043-0001 / Magnet vacuum chamber assemblies (1) / 0342-1431-0001 / Arc discharge power supply (1) / 0342-0261-4001 / Extraction assembly hot filament (1) / 0342-0564-4001 / Ion source assembly, Vaporizer SCE (1) / MW RT-125C / End station PS4 power supply (1) / U24V500M / End station unregulated power supply (1) / 5980-0005-0005 / PS, Accel / Decel, 0-5Kv/5mA (1) / 5980-0014-0002 / PS, Extraction, 0 - 20 Kv/15mA (1) / 5980-0012-0001 / PS, Suppression, 0-2.5Kv/10mA (1) / 0342-0982-4001 / Vaporizer source power supply (1) / 0342-1429-0001 / AMU Magnet power supply (1) / - / Beam alignment jig (1) / 2316-0004-0001 / Gauge, Vac, Thermal conductivity (1) / 0342-0817-2009 / Gauss probe (1) / 6171-0003-0019 / Adaptive centering KF10 / KF16 (2) / 0295-0013-2001 / Apertures, Quadrupole (7) / - / BNC Connectors (3) / 6670-0007-0103 / Bournes trimpots (1) / 110-006-043 / Cap (1) / 0563-0198 / Control panel DTC (1) / - / Convectron gauge (Granville PHILLIPS) (1) / 100-010-317 / End station arm (1) / 0342-0722 / Extraction voltage metering resistor (1) / 0342-0311-1001 / Feddthru assembly Accel / Decel (1) / 0303-0035/0301-0245 / Filament power supply controller PCB (1) / 1992-0001-0002 / Filter, EMI 10R1-10A (1) / 5867-0012-0003 / Fitting, female waterline (1) / 0342-0575-2001 / Gas coupler adapter source (1) / 0295-0016-1001 / Graphite, Aperture shutter UPST (2) / 6631-0001-002D / Magnecraft relays (25) / 296-267 / NPN Transistors, MJ15003 (2) / 0350-0025-0004 / PCB HEX Output glasses, ADKAHP/+9V (1) / 0350-0025-0005 / PCB HEX Output glass, ADKAHP/-6V (1) / 0342-0993-0001 / PCB, Keyboard display, lower assembly (1) / 0342-0913-0001 / PCB, Keyboard upper assembly (1) / 0342-0908-0001 / PCB, Source terminal data link (1) / SLA-208-AFN / Phase sequence, Loss monitor unit (1) / 110-006-018 / Retain bearing (1) / 0342-0475-2001 / Scanner feedthru (1) / 7121-0004-3001 / Shutter, Rotary graphite, 3-8" (1) / 7293-0001-0023 / Switch, Flow 1000CC (2) / 7291-0001-0001 / Switches, Thumbwheel (3) / - / DV-4D Vacuum Gauge tubes (1) / 908-788-5550 / DV-6R Vacuum gauge tube (1) / 8080-0019-0002 / Valve, Nupro air (1) / 5980-0020-0001 / High voltage stack.