中古 EATON NOVA / AXCELIS NV 6200AV-MD #293829794 を販売中
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ID: 293829794
ウェーハサイズ: 6"
Medium current ion implanter, 6"
Cassete
Standard specific layout
Burned source
Source analyzer magnet
Scanning system-single wafer
Beam energy configuration:
Beam energy: 0 ~ 180 keV
Extraction mode: 0 ~ 20 keV
Acceleration mode: 20 ~ 180 keV
Vacuum pump system:
Diff pump: VHS6
Cryo pump (beam line and chamber): CTI-8 (Three units)
Wet pump: ETM40, ET18, RV8, EH-250
Cryo compressor: CTI9600
Gas / Model / MFC Type
PH3 / MFC / SDS
BF3 / MFC / Standard
Ar / MFC / Standard.
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