中古 ASM A 412 #9224750 を販売中

Vertical atmospheric furnace, 12" Process: ATMOXANNL Safety specification: SEMI S2-0703/CE Heater model heating element: ATM FR Process condition: AP Process temperature: (C) ART control: None N2 load lock: Yes Wafer type: 12" Si SEMI STD-Notch Qty of production wafers: 150 Boat operation: 2 boat type Temperature controller: MTC UPS: None System, factory automation Host communications comply with GJG Equipment host I/F connection power box top HSMS (10Base-T) Group controller connection: None OHT capability: Yes AGV capability: None RGV capability: None PGV capability: None PIO I/F location: FNC top Carrier ID reader writer type: RF CIDRW load port read CIDRW FIMS write CIDRW Make / Model: Asyst / ATR9100 System, user interface Signal tower model: LOUGWB-24-4 Signal tower colors (from the Top): Red / Yellow / Green / Blue Signal tower location: Front operation panel Front operation panel: Yes MMI and gas flow chart gas box & front operation panel installed Indicator type: Superset Pressure display unit: MPa / Pa Exhaust pressure display unit: Pa Warning label English System, Furnace Dewpoint Meter for N2 Load Lock: Yes RCU duct length FNC - RCU NA Ionizer:None Acid chemical pre-filter (for acid): None Alkali chemical pre-filter (for alkali): None Hydrocarb chemical pre-filter (for hydrocarbon): None Side FFU chemical filter side FFU chemical filter: None O2 control for N2 LL O2 Density control for N2 load lock: Yes System, wafer / carrier handling Carrier type FOUP / 25 slots, SEMI STD FOUP make / model: Entegris / F300-2005-17UT1502 Carrier stage capacity: 32 FOUP Info pad A,B: None Fork material: END EFFECTOR242*2 CERMATIC W/T type: Gemark WHR W/T type: A/T standard System, power distribution Voltage 3 phase 480 VAC 3 phase connection type, Star connection Voltage single-phase 120 VAC Wattmeter: None System, gas distribution IGS type integrated gas system IGS make Fujikin Tubing bends less than 90deg IGS final filter PALL IGS regulator Tescom IGS MFC HORIBA STEC-Z500 series / Digital IGS press. transducer celerity Liquid source vapor system: None Gas leak detector - house system Detected Gas 1 / Location H2 / Gas cabinet Detected Gas 2 / Location NH3 / Gas cabinet Detected Gas 3 / Location H2 / BUBBLER cabinet Detected Gas 4 / Location HCL / BUBBLER cabinet Detected Gas 5 / Location NH3 / BUBBLER cabinet Detected Gas 6 / Location HCL / Reactor cabinet Detected Gas 7 / Location NH3 / Fast ramp External torch unit installed PAC: None Tape interface heater Quartz vendor requirement: None Process tube (AP, AP+Sub-AP): Quartz single Inner T/C process tube interior: Wall type (for AP Heater) Tube sealing N2 purge + Lip seal Boat type: 170 slots Ladder (5.3mm pitch) Boat material: Quartz Boat rotation: Yes Pedestal type: Quartz Cap heater: None Auto shutter: No storage purge type Earthquake countermeasure: None Process cap System, facilities Exhaust connection point: Top connection PCW connection point: Bottom connection Incoming gas connection point: Bottom connection Gas VENT connection point: Bottom connection Exhaust VENT connection point: Bottom connection Gas Unit Exh connection point: Bottom connection Power cable input location: Power box top Gas exhaust connection: Point top connection.