ID: 293759303
ウェーハサイズ: 8"
ヴィンテージ: 2022
Vertical furnace, 8"
Dual reactor
(30) Cassettes
Gases: N2, H2
Temperature: <80°C
Flat zone: 600 mm
Touch screen
Robot with automatic wafer centering system
Blower unit
Heat exchanger
Oxygen analyzer
Data logging
2022 vintage.
