中古 TECHNOS TREX 610T #156699 を販売中

Total Reflection X-Ray Fluorescence Spectrometer, 6"-8" W-Lb and Mo-Ka excitation sources TXRF for wafer surface micro metallic contamination monitoring DDRA type W_Lb source Sealed Tube type Mo source Water Chiller for DDRA cooling W-Lb DDRA and Mo-Ka irradiations Dedicated water chiller and LN2 generator W target; monochromated W-Lb1; Direct Drive Rotating Anode (DDRA) based 12 KW X-ray generator for W excitation Mo target; monochromated Mo-Ka; Sealed Tube 3KW X-ray generator for Mo excitation Si(Li) detector with counting circuit Control electronics with micro-computer Wafer handling system for 8" and 6" wafer Complete qualitative and quantitative software PC system Water Chiller for DDRA and Sealed Tube cooling Vacuum pumps (to be supplied by customer) One set of dry vacuum pump for main chamber One set of rotary vacuum pump for stage chamber One set of rotary pump for DDRA first stage vacuum pumping Options: Automatic liquid nitrogen generator: 100 V / 50 Hz / 1 Phase Liquid nitrogen is automatically generated from GN2 gas supplied by customer, and supplied to Si(Li) detector of TREX automatically Capacity: 3 liter per day, storage tank: 28 liters With reducing valve, LN2 level sensor and piping and fittings to system detector Automatic liquid nitrogen generator, KIC M50n LN2 production rate 10 liter per day with auto-fill capability Designed to use in clean room Mini environment used with TREX 610 Includes Mo X-Ray tube replacement 1998 vintage.