中古 CAMECA TXRF 8300 #9224127 を販売中

System Specimen chamber and wafer handling: Mini environment, class 1 Automatic centering and flat / Notch identification Automatic thickness variation compensation Automatic angle adjustment Independent from wafer bow or wedge Polar orientation independent of analyzed area X, Y, Z, Θ, Φ Wafer stage No vacuum chamber Organic chuck material Vacuum chucking during wafer displacement X-Ray system with: Motorized curved double multi layer monochromator Measurement of elemental impurities on Si-wafers Simultaneous measurement of >60 elements between Al and U Detection limits: < 5 x 109 atoms / cm² (e.g. for Ni) Angle adjustment of wafers to optimize signal / Background ratio Medium frequency x-ray generator, max. 3.5 kW High power fine-focus tubes System prepared for W and Mo tubes Sealed anode system Lifetime: 2,000 Hours SiLi Detector: With crystal: 80 mm² Effective sampling area: 70 mm² Energy resolution better: 150 eV Selectable time constants for variable resolution Digital detector electronics Digital pulse processing 4096 Channels ADC for spectrum analysis Pile-up rejector Escape peak subtraction Standard calibration wafer Standard droplet Ni: 1ng Computer control system: PC With 256 MB RAM FDD: 1.4 MB CD Burner HDD: 100 GB TFT Monitor, 17” 16 MB Monitor adapter with hardware acceleration Ethernet card: 10 / 100 MB Operating system: Windows NT Color ink printer Graphical User Interface (GUI) Easy set-up of measurement sequences Break function for introduction of emergency measurements Automatic optimization of filter setup Individual selection of analyzing parameters Automatic search routine for VPD droplets E-Diagnostics and remote servicing Fab automation GEM SECS Modem included Cassette stations: (2) Cassette stations, 6"-12" Front and side port Mix and match operation Different wafer sizes in an automatic run Clean room compatible cassette operation X-Ray tubes: W-Tube: 3000 W Excitation energy: Wlb: 9.67 keV / Wla: 8.40 keV Typically used for elements between Al - Zn and Nb - Ta Chiller: Separate water / Air or water / Water chiller Detector: Model no: 7163 Resolution: 150 Detector HV bias: -500 V Cryostat: Capacity: 7.5 Liters Consumption rate: <1 Liter / day Pre-amplifier: Type: OXFORD Sensitivity gain: 1.6 mV / keV FET Configuration: Substrate voltage: -16.9 V Heater voltage: 4.5 V Spare parts included: PLANAR / Multi layer block standard Translink PCI card Limit switch for DMT 100/65 Digital vacuum switch / Sensor OXFORD / ISIS 300 DXP 50 Detector Digimic for assembly 5001 u 5002.00.00 hub: 10 mm M-521.2S Linear Turntable DMT 100 mit motor PK244-02B MY-COM / C30/200 Precision switches DETECTOR ELECTRONIC / 5885/7163 Without translink card OMRON / Micro switch DSF OMRON / MY-COM Switch Wafer dish / Mess chuck 2007 vintage.