中古 NAURA / AKRION Global Advanced Modular Automated (GAMA) #293712220 を販売中
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ID: 293712220
ヴィンテージ: 2021
Wet bench
Front-Mounted Process Robot End-Effector Kel-f (PCFE)
Controller
Transfer robot
Common I/O Station - Right hand
Wafer transfer system: SMIF Capable
Dual buffer queues
(8) PFA Cassettes, 8"
Wet process models:
BOE (Premix), 18"
(2) Recirculated PVDF Tank / Auto lid
Bulk-Fill premixed BOE Faculty
Temperature: 22°C ± 0.3°C
No chemical concentration controls
Inline Teflon heater / Heat exchanger at 16°C ± 1.0°C
Teflon pump
Float level sensor
Direct drain
QDR, 18"
(2) Natural poly pro quick dump rinse tank
Flow Indicator, 0-10gpm
Ambient rinse - Spray bars
Dump / Cascade overflow rinse cycles
Flush during idle state
N2 Backpressure level sensor
Rinse resistivity
Reclaim drain
TMAH, 18"
(2) PFA Tank / Auto Lid and Fume Capture
TMAH Weight bulk fill facility 2.35%
Single HDPE Gravity dispense vessel
PFA Nuts, Recirc loop lines
Temperature: 22°C ± 10.3°C
Inline Teflon heater / Heat exchanger: 16°C ± 1.0°C
Teflon pump tachometer
Ni backpressure level sensor
Direct drain
EWO, 14"
Wash dry plenum
Dl Rinse / Ultra-Pure nitrogen dry cycles
Rinse matrix-based robot movement
Front rear Dl Spray gun
Hand aspirator tool wide plenum
Reclaim drain
HCI, 18"
(2) Recirculated PVDF Tank auto lid / Fume capture
Bulk-Fill HCI Supply line
HDPE Gravity dispense vessel HCI
Mixing ratio: HCI to Dl
No chemical concentration controls
Temperature: 22°C ± 3°C
Inline Teflon heater / Heat exchanger: 16°C ± 1.0°C
Teflon pump
Direct drain
2021 vintage.
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