中古 DNS / DAINIPPON WS-820L #293778759 を販売中

Wet stations, 8" (9) Cavities Position 3: CHCL Robot (transfer unit): R1 Chenical: DIW Processing temperature: RT Material: Bath lower section: PVC Chemical supply piping: PVDF Drain piping: C-PVC Position 4: CARO Chenical: H2SO4, H2O2 Processing temperature: 120 ±5 Bath material: Quartz Bath shape (type): Circulation overflow Bath Capacity: 36.5 L Heater: Inline Cooling tank IWAKI FF20HT Circulation pump ENTERGRIS ATX Circulation filter Pulse dumper Material: Bath lower section: HT-PVC Chemical supply piping: PFA Drain piping: HT-PVC Position 5: H/C QDR Robot (transfer unit): R1, R2 Chenical: DIW Processing temperature: 80 ±3 Bath material: Quartz Bath shape (type): Overflow Bath Capacity: 24 L HDI Unit Material: Bath lower section: PVC Chemical supply piping: PVDF Drain piping: HT-PVC Position 6 & 7: SC-1-1 Chenical: NH4OH, H2O2, DIW Processing temperature: 70 ±3 Bath material: Quartz Bath shape (type): Circulation overflow Bath Capacity: 32.5 L Heater: Inline Aspirator Cooling tank IWAKI FF20HT Circulation pump ENTERGRIS ATX Circulation filter Pulse dumper Material: Bath lower section: HT-PVC Chemical supply piping: PFA Drain piping: HT-PVC Position 8: H/C QDR Robot (transfer unit): R2, R3 Chenical: DIW Processing temperature: 80 ±3 Bath material: Quartz Bath shape (type): Overflow Bath Capacity: 24 L HDI Unit Material: Bath lower section: PVC Chemical supply piping: PVDF Drain piping: HT-PVC Position 9: HF-1 Chenical: HF (49wt%), DIW Mixing ratio: 10:1 / 100:1 Processing temperature: 25 ±0.1 Bath material: PTFE Bath shape (type): Circulation overflow Bath Capacity: 37 L Gravity IWAKI FF20HT Circulation pump ENTERGRIS ATX Circulation filter Circulation housing: PFA, 10" Concentration monitor Pulse dumper Chemical / H2O Supply function: PMU, CCSS O3 Generator Material: Bath lower section: PVC Chemical supply piping: PFA Drain piping: C-PVC Position 10: EDR Robot (transfer unit): R3, R4 Chenical: DIW Processing temperature: RT Bath material: Quartz Bath shape (type): Overflow Bath Capacity: 24 L Material: Bath lower section: PVC Chemical supply piping: PVDF / PFA Drain piping: C-PVC Position 11: FR Chenical: DIW Processing temperature: RT Bath material: Quartz Bath shape (type): Overflow Bath Capacity: 28.6 L Material: Bath lower section: PVC Chemical supply piping: PVDF / PFA Drain piping: HT-PVC Position 12: YD Robot (transfer unit): R4, R5 Position 13: OUT-CTC Robot (transfer unit): R5 2011 vintage.