中古 DNS / DAINIPPON SU-3100 #293615278 を販売中

Wet station, 12" PR Strip process (DECAP) PC (8) Chambers Chemical: SC-1, SPM Temperature (SPM / SC-1): 50°C-150°C / 30°C-120°C Handler (4) Load ports Chemical units: H2SO4, H2O2, NH4OH, DHF Overhead Transport System (OHT) YASUKAWA ELECTRIC CORPORATION XU-ACT153L-H01 ID/R CAMBRIDGE Filter GA5-445480E-SWLER FFU Capacity: 99.9999 <% or more of 0.1 µm particle Test (m³/min): 5.6 at 120 pa Range of air control: 0.4 m/sec Shield plate Spin base: Material: PCTFE Spin motor: AC Servo motor Revolution: Maximum 3000 rpm Revolution accuracy: ±3 rpm Chuck: Drive: Pulse motor Material: PCTFE, ETFE Wafer detection: Detection by chuck pins Shield plate: Material: HT-PVC Revolution drive: AC Servo motor Revolution: Maximum 3000 rpm Acceleration: Maximum 1000 rpm/sec Revolution accuracy: ±3 rpm Shift: AC Servo motor Wafer surface distance : Minimum 0.3 mm Splash guard: Structure: Chemical collection Material: PTFE Shift: AC Servo motor Sputter: Drive: Air cylinder Chemical cabinet-1,2: Temperature control of low temperature Chemical used: SPM, SC-1 Mixing ratio: Premix SPM: 50-150°C SC-1: 30-120°C Circulation pump: PILLAR In-line heater E-Flow: SD16L-24SHR E Module HORIBA HE-480-DC Resistivity meter ESD-001C-T Resistivity sensor CK-10M Sensor cable EFA-30 Sensor holder MY2N-CR DC 24 V Relay Chemical cabinets: CC1-SPM CC2-SC-1 E-Flow (4) Cooling tanks Power rack Missing parts: I/O Board H/D 2012 vintage.