中古 DNS / DAINIPPON SU-3000 #293591332 を販売中

Wafer cleaner, 12" Single wafer processing Wet process: HF Clean Processing unit: Backside nozzle (3) Fixed nozzles with holder Splash guard Scan nozzle home drain port Separation box Fluid box trap tank Controllers: TOSHIBA Industrial computer Indexer robot controller Chemical cabinet controller YASUKAWA Servo pack KOMATSU Thermal controller Mass Flow Controller (MFC) Load port controller Solenoid controller Drive mechanisms: YASUKAWA Indexer robot (3) Load ports FOUP Mapper YASUKAWA Center robot Chamber shutter door (2) Reversers Spin base (3 Movable pins) Shield plate MPC Scan nozzle 1 type 3 arm MPC Scan nozzle 2 arm Chuck position sensor Wafer presence Fluid system: (4) CSBs, 5 L (2) Mixing tanks, 60 L Reclaiming tanks (3) Thermal circulators (4) Bellow pumps (4) Pumps (4) Chemical circulation filters (2) HORIBA Concentration monitors Ultrasonic flowmeters (2) Chemical cabinet drain trap tanks (4) UPW Filters E-Flow units Resistivity meters (4) SMC Pumps Rotameters Mechanical oil gauges Digital gauge Tank level sensors CS Heater EMO Leakage sensors Cover interlock sensors Tower lamps Flashing lamps Gas system: N2 Filters Speed controllers Exhaust system: Exhaust switching boxes FFU Exhaust gauge FFU Gauge MPC 1, 2, 3 and 4: 100:1 HF, 300:1 HF, NH4OH 0.5wt%, H2O2 1wt%, CO2 Water, HPN2 Description / Power rating AC Power cabinet with UPS / 208 V, 3 Phase HF Chemical cabinet / 208 V, 3 Phase (49% HF) SC1 Chemical cabinet / 208 V, 3 Phase (28% NH4OH, 30% H2O2) LUFRAN Heater / 480 V, 3 Phase UPS / 60 V Does not include Hard Disk Drive (HDD) 2010 vintage.