中古 KLA / TENCOR / PROMETRIX RS-75/TC #179989 を販売中

Resistivity mapping system, 8" Hardware Configurations: Handler Type: H2 handler, with two open cassette platens, it can be attached with ASYST Load port for SMIF fab Computer: 486/66 MHz SW(StatTrax) Version : ST-6.70 Probe Head: x1 (Probe head type is optional depends on request) Standard User interface - Monitor, Keyboard, trackball Standard Media : Floppy Disk(1.44M) Measurement Specifications: Measurement Range: 5m Ohm/sq - 5M Ohm/sq Absolute accuracy: ±1% of NIST certified range, based on NIST(NBS) standard wafers corrected to 23oC Measurement Repeatability: < 0.2% (1σ), based on KLA-Tencor’s “Probe Qualification Test”, 1 inch test diameter, using the appropriate probe head. Temperature Accuracy: ±0.5oC Temperature Repeatability: ±0.2oC Measurement Capabilities: Routine check: 1-30 sites programmable XY map: up to 1,200 sites programmable Single or dual configuration capability All standard wafer sizes: 100, 125, 150 and 200 mm Analysis Capabilities: Contour/3-D map: 49, 81, 121, 225, 361, 441, 625 sites Diameter scan: 49, 81, 121, 225, 361, 441, 625 sites Probe qualification test: 20 sites, programmable radius Trend and SQC charts Histograms Calibration curves for low dose monitoring Data Transfer Capabilities: SECS-II, RS232 communication Enhanced SECS-II for fully automated operation (optional) 1996 vintage.