中古 KLA / TENCOR / PROMETRIX Omnimap RS-75 #9190988 を販売中

Resistance mapping system Measurement range: <5 mΩ/sq - >5MΩ/sq Appropriate probe head: <0.2% (1σ) Manually loaded single wafer: ≤60 seconds Typical measurement time: 49-site test Measurement capabilities: Routine check: 1-30 sites programmable (ASTM standard tests included) XY Map: 1,200 sites programmable Single/Dual configuration capability Analysis capabilities: Contour/3D map: 49, 81, 121, 225, 361, 441, 625 sites Diameter scan: 49, 81, 121, 225, 361, 441, 625 sites Probe qualification test: 20 sites, programmable radius Calibration curves for low-dose monitoring File editing/data extraction capability Average difference/ratio maps Trend/SQC charts Histograms Data transfer: SECS II/RS232 Communication (Data upload) Precision probe heads: 40 mil Probe spacing: 100 gm loading Tip radius: 1.6, 4, 8 and 20 mil 25 mil Probe spacing: 100 gm loading Tip radius: 1.6, 4, and 8 mil 62.5 mil Probe spacing: 200 gm loading Tip radius: 1.6 mil High-speed tester accommodates all standard wafer diameters in thicknesses up to 2 mm: 2, 3, and 3.25 in; 100, 125, 150 and 200 mm Includes: High-resolution color monitor 1.4 MB, 3.5" floppy drive Fixed hard drive Line conditioner EMO Circuitry Pentium computer 1997 vintage.