中古 EDWARDS 306 #89773 販売用

This EDWARDS 306 has been sold.

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ID#: 89773

メーカー:

EDWARDS

モデル:

306

カテゴリー:

SPUTTERING SYSTEMS

機器の詳細:

Manual sputtering system 10" from spinning substrate holder on top to targets on bottom Stainless steel chamber, 12" diameter x 10.5" tall Includes viewport Diffusion pump Dual sputtering guns (~3.5" diameter) Glow discharge for soft etch Micrometer adjusted gas input Pirani gauge ADVANCED ENERGY MDX digital DC sputtering supply Manual valving Options available: Ion gauge to measure vacuum level at 10-7 (installed) Mass flow control for 2 gases Upgrade to cryopump.
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