中古 VARIOUS Lot of spare parts #9219224 を販売中

Qty / P/N / Description (1) / 0010-00283 / Assembly GENEVA drive (1) / 0010-01922 / 7 Pins ESC box (Alternate P/N for 0010-04561) (2) / 0010-03706 / Assemblies DC bias HTHU (1) / 0010-04450 / MCA Sub zero e-chuck (1) / 0010-04561 / Biased electrode AC box assembly ESC (1) / 0010-09027 / P5000 Robot blade (1) / 0010-09935 / Monochromator (1) / 0010-13928 / PC II Interlock harness (1) / 0010-19238 / Throttle valve drive assembly with 90 (1) / 0010-20129 / Buffer blade assembly, 6" (5) / 0010-20138 / TC Amp housing assemblies (2) / 0010-20278 / Degas modules, 8" (2) / 0010-20472 / Monolith wafer detector assemblies (1) / 0010-20511 / Heater DC Bias short detect assembly (1) / 0010-20524 / PC II RF Match, 8" (1) / 0010-20524 / Preclean II RF Match, 8" (1) / 0010-21127 / Magnet assembly (1) / 0010-21264 / Shutter linkage assembly (1) / 0010-21336 / Shutter bar assembly (1) / 0010-21393 / Shutter rotation assembly (2) / 0010-21789 / DC Bias assemblies (2) / 0010-30419 / Heaters, 8" NLT.060 (1) / 0010-35328 / Transfer PCV controller (3) / 0010-36940 / Auto bias phase IV (3) / 0010-36941 / Auto bias, 8" (1) / 0010-37119 / Assembly adapter plate auto bias (3) / 0010-37465 / Auto bias, 6" HE matches (3) / 0010-37466 / Auto bias, 6" phase IV (1) / 0010-39202 / Multi slot cool down chamber (1) / 0010-70773 / Direct DR throttle valve assembly (1) / 0015-09095 / P5000 Robot teflon timing gear (1) / 0020-10732 / Pumping plate BW, 8" (2) / 0020-13721 / Buffer blades (2) / 0020-20123 / Heater isolation ceramics (6) / 0020-20390 / Robot shoulders (2) / 0020-20431 / Collimators, 6” (4) / 0020-20462 / Viewport quartz windows (6) / 0020-20521 / Spacer insulator lifters (4) / 0020-21025 / Transfer wrists (1) / 0020-21033 / Transfer blade, 6" (2) / 0020-21105 / Buffer wrists (1) / 0020-21704 / Chuck orienter, 5" (2) / 0020-21706 / Orientor wafer chucks, 6" (8) / 0020-23093 / Washer insulators for PVD (1) / 0020-23237 / Wafer slide PCB Mounting bracket (1) / 0020-23591 / Optic detector tube orienter (2) / 0020-23593 / Plates 6" CCD vacuum seal (1) / 0020-24144 / Cover thermal SW degas (3) / 0020-24236 / Clip springs PC II antena dowell (4) / 0020-25304 / Caps HTHU 6" Heater (2) / 0020-26397 / ESC Hoop and fingers, 8" (3) / 0020-26691 / Pin heaters, 6" (2) / 0020-27668 / Shutter blades, 8" (3) / 0020-28622 / Transfer blades (1) / 0020-28714 / Restraint ring ESC (5) / 0020-28888 / Plungers, DC bias (3) / 0020-29207 / Posts, DC bias (1) / 0020-31572 / Blocker plate, 8" WSI (3) / 0020-40624 / Caps (1) / 0020-41153 / Holder pin E-Chuck (3) / 0020-41157 / Sleeve lift posts (6) / 0020-70336 / Robot arms (1) / 0020-75982 / HTSEC Spring steel ground (1) / 0021-15555 / MCA + Edge ring (1) / 0021-20494 / HTHU Heat shied right (1) / 0021-20495 / HTHU Heat shied left (4) / 0021-23198 / Hoop lift opens, 8" MCA e-chuck (1) / 0040-09263 / WSI Perf plate, 8" (2) / 0040-18091 / ULTIMA / ALN Heater block assemblies (1) / 0040-20165 / Cross backside gas (1) / 0040-22829 / Shutter blade stop, 8” ESC (2) / 0020-20117 / Sensor source assembly wafer slippages (2) / 0090-20118 / Sensor detector assembly wafer slippages (3) / 0090-76058 / Wafer orienter PCBs (2) / 0091-01719 / Lift pin ceramics long HDP (2) / 0100-00014 / Opto detect PCBs (1) / 0100-09009 / Buffer I/O (1) / 0100-09011 / Ai Mux current sense (1) / 0100-09056 / Center finder SBC (2) / 0100-20000 / Ai Mux PCBs (6) / 0100-20004 / Chamber interconnect PCBs (2) / 0100-20066 / Wafer mapping analog sync detect PCBs (3) / 0100-20069 / Wafer orienter PCBs (1) / 0100-20143 / Load lock wafer sensor PCBs (1) / 0100-35054 / Chamber interface (Centura) (5) / 0100-76042 / Enhanced OTF center finders (2) / 0140-00343 / PC II Chamber harness (2) / 0140-20118 / Laser power harness (1) / 0140-20139 / Harness assembly turbo on / Off (1) / 0140-20178 / Chamber harness PVD (1) / 0140-20255 / Endura MFC gas box harness MFC's 1-10 (1) / 0140-20494 / Power harness wafer slide detector (1) / 0140-20537 / Harness RF match C, D PCII (1) / 0140-20574 / Endura MFC gas box harness MFC's 11-20 (2) / 0140-20693 / Shutter interface harness (1) / 0140-21406 / High efficiency match harness IMP (1) / 0140-21407 / High efficiency match harness IMP (1) / 0140-36042 / Auto bias interface harness (2) / 0140-37846 / MCA + ESC PVD Chamber harness (1) / 0140-76222 / Chamber harness PVD (1) / 0140-76223 / Chamber harness PVD (1) / 0150-13078 / PC II Interlock harness (2) / 0150-20103 / CCD Array ribbon cables (3) / 0150-20660 / Cable PCII match to chambers (1) / 0150-21357 / Chamber 1 Interconnect (1) / 0150-21692 / RF Cable SQ with right angle and interlock (1) / 0190-09135 / Monochromator fiber optic interface cable (1) / 0190-13321 / 1.5 k volt ESC supply (1) / 0190-21303 / PC II RF Cable (34) / 0190-70070 / Bearings (4) / 0190-70075 / Bearings (5) / 0190-70076 / Bearings (7) / 0190-70120 / Bearings (1) / 0190-76005 / OMS Stepper PCB (9) / 0190-76106 / VHP Bearings (1) / 0190-76244 / Dual zone driver assembly (1) / 0200-09072 / Shield WISX, 8” (1) / 0200-09129 / Isolator ceramic (1) / 0200-09444-001 / Cap top quartz 25 mm tube ASP PRSP3 (1) / 0200-09447-001 / Plate quartz gas dist upper 150 mm PRSP3 (1) / 0200-35013 / Extended pin (1) / 0200-35702 / Ring edge DXZ+ (1) / 0200-36105 / Chamber insert, 8" TXZ CIP (3) / 0200-40221 / Shaft cover rings, top hat (3) / 0200-40222 / Shaft cover rings flat (1) / 0240-75137 / Kit electrical wafer slippage (1) / 0240-75141 / Kit wafer slippage (Mirrors, mounts, reflectors) (1) / 0240-76087 / Orienter overtemp switch kit (Assembly) (1) / 0242-19503 / Kit VHP robot bearing PM (1) / 0242-76881 / Kit 6" WB hoop, PVD (1) / 0660-01090 / OMS Stepper PCB (1) / 0870-01028 / DRVR 5-Phase stepper motor (3) / 0920-01103 / Astron AX 7650 Flourines (1) / 0950-01449 / Laser diode WL 780 nm (1) / 1 SLM / 1660 Metal seal N2 (1) / 100 SCCM / 1660 Metal seal N2 (1) / 1350-01124 / 0.1 Torr manometer (1) / 1350-01039 / 10 Torr manometer (4) / 3060-01145 / Bearings (1) / 3310-01055 / Convectron gauge (1) / 3380-01013 / TXZ Gas box N2 Heater element (31) / 3780-01174 / Springs (47) / 3880-01215 / Teflon washers (1) / DPGS-10-01 / ENI DP Generator (4) / 839-440462-108 / LAM Assembly, cap, ELCTD, 8", ESCs.