ID: 293616983
ウェーハサイズ: 12"
Qty / Description
(1) / AS Cut cleaner
(1) / Lab etcher
(1) / Ellipsometer, 12"
(1) / EBIS, 12"
(11) / DSP, 12"
(2) / SRP
(1) / Quartz cleaner, 12"
(4) / Box cleaner, 12"
(1) / Carrier thickness precision meter for DSP
(32) / Vacuum pump.
