中古 VARIAN Spare parts for Implanter and Sputtering system #293609970 を販売中
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ID: 293609970
Qty / Model / Description
(1) / - / Adapter
(1) / - / Chamber adapter
(1) / - / Deposition control PCB
(1) / - / DM Consumable box
(5) / - / Feedthroughs
(2) / - / Plate cylinders
(1) / - / QTM TQT Dark space shield
(1) / - / Seal door oring
(2) / - / Solenoids
(2) / - / Spare parts
(1) / - / Source magnet DC Amp gauge
(3) / - / Spare parts
(2) / 160XP / Beam gates
(1) / 160XP / Beam gate assy
(2) / 160XP / ES Disk arms
(3) / 160XP / ES Disk arm cylinders
(3) / 160XP / Hi-Vacuum valves
(3) / 160XP / Isolation valves
(1) / 160XP / Manipulator assy
(4) / 160XP / Red bushes
(1) / 160XP / Source housing
(1) / 160XP / Analyzer chamber and high vac valve
(1) / 160XP / Auto loader control unit E1615A
(1) / 160XP / Mechanical power distributor
(2) / 160XP / RLS
(2) / 160XP / Source field power supplies
(1) / 160XP / Suppression power supply
(1) / 160XP / Buffle valve
(3) / 160XP / Cassette assemblies
(2) / 160XP / Disk motors
(1) / 160XP / Gas box controller
(1) / 160XP / Loading transfer assy
(3) / 160XP / Monitor
(3) / 160XP / Sup power supplies
(1) / 160XP / Wafer orientation assembly
(2) / 160XP / Feedthru spindle disks
(1) / 300XP / Magnet
(1) / 300XP / Accel power supply
(1) / 300XP / Accel power supply (High voltage)
(1) / 300XP / Analyzer magnet current supply
(1) / 300XP / Current integrator
(1) / 300XP / Hi vac valve
(1) / 300XP / Interface module
(1) / 300XP / Operator monitor
(2) / 300XP / Operator setup
(2) / 300XP / Scan amplifiers
(1) / 300XP / Terminal setup control
(1) / 300XP / Transformer
(1) / 300XP / Beam scan controller
(1) / 300XP / Control
(1) / 300XP / Current integrator
(1) / 300XP / End station controller
(1) / 300XP / Energy tracking controller
(1) / 300XP / Faraday blas
(1) / 300XP / High voltage feedthru
(2) / 300XP / Pick assemblies
(1) / 300XP / Platen interface
(1) / 300XP / Power supply
(1) / 300XP / Quadlens assy
(1) / 300XP / Scanner power supply
(1) / 300XP / Shorting bar assy
(1) / 300XP / Source magnet
(1) / 300XP / Source magnet power supply
(1) / 300XP / Track load valve
(1) / 300XP / Lift elevator
(1) / 300XP / DOSX Processor
(3) / 300XP / High voltage power stages
(3) / 300XP / IG Controllers
(1) / 300XP / Lens power supply
(1) / 300XP / PS Manifold
(1) / 300XP / Terminal set up control
(1) / 300XP / Water heat exchanger
(1) / 3290 / Cap for pressure plate bellow
(1) / 3290 / Exterior pole insert
(3) / 3290 / Shutters feed thrus
(2) / 3290 / Ram bellow assy load locks
(3) / 3290 / Ram bellow assy pressure plates
(1) / 3290 / Load lock ram door
(1) / 3290 / Tarliet removal jig
(28) / 3290 / Bore shields
(29) / 3290 / Cavity shields
(15) / 3290 / Centre pole shields
(82) / / 3290 / Ceramic ring cover shields
(16) / 3290 / Ceramic rings
(6) / 3290 / Chamber hivac nets
(17) / 3290 / Conmag II dark space shields
(17) / 3290 / Half circle shields
(2) / 3290 / Heaters
(38) / 3290 / Heater shields
(1) / 3290 / Hivac net support shield
(12) / 3290 / Load lock ram clips
(6) / 3290 / Load lock ram covers
(28) / 3290 / Middle pole outer support shields
(40) / 3290 / Middle pole piece inserts
(51) / 3290 / Outer pole shields
(14) / 3290 / Pressure plate ram bellow stoppers
(3) / 3290 / RF Isolation shields
(1) / 3290 / Shield quick relieve spring
(42) / 3290 / Shutter shields
(2) / 3290 / Target ceramic.
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