中古 TEL / TOKYO ELECTRON Spare parts for Unity II 85DD #9378258 を販売中
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ID: 9378258
Qty / Part number / Descripition
(7) / ES1D10-309946-12 / Focus ring
(7) / ES1D05-300188-12 / Ring insulator A7
(7) / ES1D05-300190-12 / Ring insulator B2
(3) / ES1D10-204338-13 / Upper electrode
(2) / ES1D10-315272-11 / Ring shield
(2) / ES1D05-400022-14 / Window shield depo (Y2O3 Coated)
(2) / ES1D10-102848-13 / Baffle plate
(2) / ES1D10-204419-12 / Cover belows
(2) / ES1D10-315183-15 / Depo shield
(6) / ES027-100389-1 / O-Ring viton.. AS586-259 BLK, ES0.
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