中古 TEL / TOKYO ELECTRON Spare parts for SS-4 #9352780 を販売中
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ID: 9352780
Qty / Part number / Description
(1) / 012-002727-1 / Valve / Solenoid valve VJ314RT
(1) / SS-SCR DELL / HDD / TEL for QUARC
(1) / 1910-337974-12 / SS-4C Under cover
(2) / 1910-351112-12 / Nozzle holders
(1) / 1910-220867-12 / Top plate, 8" (Tail side SCR)
(2) / 1910-348067-1 / Sub cup for back side units
(2) / 1386-457688-11 / M/A X1 Sensors assy (SCR)
(2) / 1984-000241-11 / 78 Mapping sensors assy
(42) / 2S04-300001-11 / SCR Black blocks, 8"
(2) / 1380-001400-11 / Weight sensors PS-05G-R012-S142
(1) / IRF9530PBF / HEXFET Transistor
(1) / 2S10-304461-11 / LM Stroke
(1) / 2S10-304461-11 / Shaft
(2) / 022-100867-1 / Bearings (6804ZZ)
(2) / 1310-497296-11 / Collers
(1) / 018-001065-1 / Linear way LWLF24C1R120T1H/U
(1) / 1310-497291-11 / Encoder holder
(1) / 025-100629-1 / Shock absorber F2M8B005-C
(1) / 023-000600-1 / Timing belt 324-3GT-9
(14) / 2S26-000002-12 / Brushes (32) Rev 12 (Old: 2S10-400784-11)
(9) / CBUV0S0P1 / Filter / scrubber optimizers DI 0.1μm
(3) / 024-011061-1 / Air cylinders for RVS (CDJB16-100-B-XB9)
(28) / CBUZ0S0P1 / Filter / Scrubber optimizers DI 0.05μm
(2) / SS-100-61 / SS Swagelok tube fitting, bulk head union, 1/16 tube OD
(2) / 024-023500-1 / Air cylinders CDU20-50D-M9NW-XB9 (Old:024-012606-1)
(10) / 028-005738-1 / Fitting tubes
(12) / 1904-400071-12 / Guide pins
(2) / 024-006917-1 / Filters WGFG 21K
(1) / 2S10-401147-12 / Seal base
(3) / 024-013439-1 / Air cylinders (SMC CJ2B10S-E5969-30)
(2) / 1910-445584-13 / Mini blow plates (Back side SCR)
(1) / 024-011626-1 / Jet nozzle tip, spray tip (Nozzle Φ0.1mm)
(60) / S-U-W2B / Unions (1/4 X 1/4)
(10) / XA-1086-320 / PFA tubes (1/8 X 1/16) (7-309-06)
(3) / 1386-447877-12 / SCR L-Arm motors assy
(2) / 1386-447878-11 / SCR L-Arm motors CBL
(3) / 1386-447881-11 / SCR L-Arm ENC assy
(2) / 1386-447882-11 / SCR L-Arm ENC CBL
(2) / 036-001669-1 / Sensor pressure PS8-103G
(1) / 1386-461774-12 / Leak sensor assy (LSP-0-1)
(2) / 018-002746-1 / LM Guides RSR7ZM+94LMS (AFF)
(1) / CDJ2B16-100-B-XB9 / Air cylinder for RVS
(1) / CDJ2B16-123-B-XB9 / Air cylinder for RVS
(1) / FB31B-15 / Safety breaker
(2) / 1910-321310-13 / Guides L
(2) / 1910-321311-13 / Guides R
(1) / 024-011294-1 / NH4OH Regulator PMM20-X20
(1) / 1904-100103-11 / Inner cup
(1) / 024-020530-1 / Air cylinder for RVS (CDJB16-123-B-XB9)
(1) / 012-008484-1 / Air operate valve AMD01-X32S
(1) / 024-013580-1 / N2 Filter CEP-TM1L-SW-02P
(1) / 1986-410136-11 / 2P, X-Axis motor assy
(1) / - / FDD for SS-4
(1) / 036-002190-1 / Pressure sensor VPRQ-20MP 3M
(1) / 1985-456771-11 / X Pulley assy (A)
(1) / 1985-456772-11 / X Pulley assy (B)
(1) / 1910-335985-11 / SCR Top cup.
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