中古 TEL / TOKYO ELECTRON Spare parts for ACT 12 #9293177 を販売中

Make / Model / Description YOKOGAWA / DR1200A00 / DD Servo actuator YOKOGAWA / DR1200A00 / DD Servo actuator PTI / PROGRESSIVE TECHNOLOGIES / 12612G01 / Automated exhaust sentry RKC INSTRUMENT / REX-B870-CS1 / Temperature controller RKC INSTRUMENT / REX-B870-CS1B / Temperature controller YASKAWA / USAHEM-02-TE53 / Spin motor, 8" YASKAWA / USAHEM-02-TE53 / Spin motor, 8" NSK / XY-HRS055ZM123 / IRA Z Axis track NSK / XY-HRS030ZM105 / CRA Z Axis track TDK / MSE343B / Interface block DC power supply NSK / ESA-J2006AF3-20 / Servo drive, θ theta axis, 12" PANASONIC / CK88YP200V03 / Power unit PCB card PANASONIC / MSD023A1XX / AC Servo driver MINAS, 12" PANASONIC / MSD5AZA1Y / Driver unit PCB card, 50 W PANASONIC / MSM042A5F / Servo motor, 8" NSK / JS2006FN509 / Servo motor, 8" NSK / JS1003FN506 / Servo motor, 8" SHINYEI / THT-B121S3 / Humidity and temperature transmitter with THP-B4TW KOGANEI / F-AVP125-19W / Pneumatic valve KOGANEI / F-AVP070-6W / Pneumatic valve YASUNAGA / YP-20V / Air purge pump PANASONIC / 581B344B / Back-plane connector PCB VEXTA / CSD5807N / Driver TDK / TK011-90-A-00 / Interface board PCB TAKADA / FJ39EB-X010N0 / CRA X Board PCB NSK / E043ZZIF1-002 / PCB TIF Board TAKADA / FJ39EB-T010N0 / CRA Board PCB PANASONIC / MSM3AZA1N / Servo motor LIEBERT / 4C13571G1 / Interface board PCB Rev.6, 8" SANYO DENKI / PM-UPD1S06-20 / PM Driver TAIYO MACHINERY / CN-Base / Back-plane interface board PCB YASKAWA / SGDA-01APPY126 Servo drive servo pack LAMBDA / JWS100-24A / DC Power supply module, 24 V, 4.5 Amps VEXTA / 2980-193383-11 / Motor VEXTA / CSD5807N-P-A11 / Motor D1C-2203-K / High temperature hot plate, 12" D1D-2029-K / Low temperature hot plate station, 12" 847 / Adhesion plate process station, 12" 844 / Low Temperature Hot Plate process station (LHP), 12" 2981-600314-11 / High Temperature Hot Plate process station (HHP), 12" 844 / Low Temperature Hot Plate process station (LHP), 12" - / Interface Block Robotics Arm (IRA), 12" 877 / Cassette Block Robotics Arm (CRA), 12" - / Interface Block Robotics Arm (IRA), 8" 847 / Adhesion process station, 8" - / Interface Robotics Arm (IRA), 12" 845 / 5085-404315-17 / Chill Plate process station (CPL), 12" - / Chill Plate process station (CPL), 12" - / Interface Block Robotics Arm (IRA), 8" - / Cassette Block Robotics Arm (CRA), 8" 845 / Chill Plate process station (CPL), 8" 846 / Chill Plate process station (CPL), 8" 845 / Chill Plate process station (CPL), 8" 849 / Chilling Hot Plate process station (CHP), 8" 849 / Chilling Hot Plate process station (CHP), 8" 849 / Chilling Hot Plate process (CHP), 8" 845 / Chill Plate process station (CPL), 8" 849 / Chilling Hot Plate process station (CHP), 8" 849 / Chilling Hot Plate process station (CHP), 8" 849 / Chilling Hot Plate process (CHP), 8" 849 / Chilling Hot Plate process (CHP), 8" 848 / Transition Chill Plate station right (TCP), 8" 384 / ADH Pin stand station, 8" 847 / Adhesion process station (ADH), 12" 847 / Adhesion process station (ADH),12" 848 / Transition Chill Plate station left (TCP), 8" 2985-411180-W6 / Cool plate module, 12" 848 / Transition Chill Plate process station left (TCP), 8" 847 / Adhesion plate process station (ADH), 12" 844 / Low Temperature Hot Plate process station (LHP), 12" 847 / Adhesion process station (ADH), 12" 849 / Chilling Hot Plate process (CHP), 8" - / Interface Robotics Arm (IRA) 849 / Chilling Hot Plate process (CHP), 8" - / Interface Block Robotics Arm (IRA), 8" 845 / Chill Plate Process Station (CPL), 12" 2985-429208-W4 / Sub unit adhesive module, 12" 2985-429208-W4 / Adhesive module base, 12" 847 / Adhesion Process station (ADH), 8" 2985-423760-W3 / Interface block cooling (IFB), 12" 2985-445336-W1 / Interface block cooling (IFB), 8" 847 / Adhesion process station, 12" 844 / Low temperature hot plate process station (LHP), 12" 2985-445336-W1 / Interface block cooling (IFB) 838 / Shuttle slider assembly (SHU), 12" - / X Axis assy robotics arm, 12" PRA / - / X Axis assy robotics arm, 8" TMD002-X8 / Solvent buffer tank assembly HTE-OA1-B-11 / Oven board with PCB, 12" TDK MSE181E / Interface block DC power supply HTE-OV1-11-B / Oven I/O board PCB, 8" 2985-469941-W1 / Process block robotics arm X-axis 2985-449464-W3 / SHU Wafer shuttle slider assembly PANASONIC / 581B357C / CPU Processor PCB Card - / Stepper interface stage assembly stand 383 / ADH Pin stand assembly, 8" HTE-OA1-B-11 / Oven with board, 12" AP9E-0318C-12 / PCB Assembly 848 / Transition Chill Plate station left (TCP), 12" HTE-OV1-B-11 / Oven I/O board 2985-438909-W1 / Develop cup assembly 2981-600618-11 / I/O Display LPC-T0007A-11 / Load port assembly PANASONIC / MSD3AZA1Y04 / X Driver unit AP9E-0318C-12 / Motor I/O board PCB 2985-461034-W1 / Cup base assembly 2985-490048-W8 / Motor flange assembly 2985-406657-W1 / Dev scan (12L) assy Left, 12" - / Develop process station air valve assembly, 12" - / Develop process station sliding door set of 4 HTE-PUM-A-11 / Pump with board pcb HTE-TGR-B-W1 / Ghost repeater board PCB HTE-TGR-A-11 / Ghost repeater board, 12" HTE-IFA-B-W1 / IFB with board PCB EHX / Box pressure manometer panel - / Developer 381 / LHP EXT Cover station frame - / Air valve assembly develop process station, 12" TMD002-X8 / Buffer tank assembly 2910-304205-11 / Rinse bath assembly - / Pneumatic control panel (PHP), 12" 2987-416025-W3 / X-axis assembly - / Pressure control panel ejector drive / HP cooling (PHP), 8" CPC-T0001A-13 / Chemical I/O board PCB - / Interface rollers and interface bracket HTE-PRB-A-11 / Panel I/O board PCB - / Wafer transport stepper interface, 8" 2985-413414-W4 / Slider assembly (SHU), 12" LPC-T0007A-11 / Load port with board PCB F-T100-3 / Pump 2981-600534-11 / Connect BLT/L board PCB 2981-600832-11 / Board, I/O PCB SP001, 12" F-T100-2 / Pump - / Cup wash disc, 12" 2985-412389-W1 / 12-R Nozzle bath assembly 2910-100464-11 / Shutter HTE-PUC-A-11 / Pump connector board PCB - / Cup wash disc assembly, 8" 2981-600410-11 / PRA Z Board PCB EPC-T0091A-11 / EXT IF Board PCB, 12" 2981-600418-11 / I/F Board PCB, 12" HA-039 / Board, 12" 2981-600409-11 / PRA X Board PCB 2981-600408-12 / PRA Base board SH5M015T1 / Filter assembly HA-010 / Board 2981-600514-11 / EXT DIO Board PCB 2981-600310-12 / DC/DC Converter board PCB RL06EX-2 / Relay board PCB 2981-600386-13 / EXT DIO board PCB 2985-415077-W2 / Spin shutter (12-L) assy, 12" PPC-T0006A-11 / PLD (CHEMI) PCB 2981-600374-11 FDD Board PCB LPC-T0009A-11 / Load Port DC/DC converter board PCB 2981-600418-11 / I/F Board PPC-T0006A-11 / PLD (CHEMI) PCB PPC-T0006A-11 / PLD (CHEMI) 2981-600395-11 / I/F Board CKD / AMD11-X1262 / Valve MA-13005 / COM SW Interface panel assembly PCB 2981-600001-12 / Ghost terminator board PCB SH5M015T1 / Photoresist filter assembly 2981-600550-11 / I/O Board MA02702 / LCD Board PCB MA-13005 / COM SW board PCB, 12" - / Fuse block, 8" 2981-600355-14 / STP IF Board - / Interface block roller 2981-600552-11 / C/S Fan connection board PCB, 12" CPC-G229A01B-11 / Pump connection board SH5M015T1 / Photoresist filter LPC-T0008A-11 Load port connection board 2981-600328-11 / DC Power branch board PCB 2981-600595-11 / Interface board PCB.