中古 TEL / TOKYO ELECTRON LHP #9195864 を販売中

Low temperature hot plate process station Removed from TEL Clean Track ACT12-300 system, 12" Part list: LHP Sub unit base assembly P/N: 2985-403750-W7 LHP Plate support assembly P/N: 2985-428775-W1 LHP Shutter assembly P/N: 2985-527777-11 LHP Ext. cover assembly P/N: 2985-401328-W4 N2 Purge assembly P/N: 2985-413218-W1 Cover aperture P/N: 2985-440725-W1.