中古 LAM RESEARCH / ONTRAK Lot of spare parts #9266602 を販売中
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ID: 9266602
Part number / Description
715-12233-002 / Inner gate plate
715-330135-001 / Gas injection ring
715-330135-002 / Gas injection ring
715-330984-001 / Gas injection ring
715-330984-300 / Gas injection ring
888-107103-002 / Shaft cylinder screw
715-012165-008 / Holder wafer, 8", tight pocket
715-130092-006 / Holder wafer, 6", arm exit
715-030319-001 / Cover screw BSR
715-330825-007 / LIR, Chamber, AL, ALLI BSR 9600
715-012165-006 / Wafer holder tight pocket, 6"
715-495013-001 / Pendulum V/V wall liner
839-495013-001 / Extension chamber wall liner-II
715-330133-001 / Ring upper chamber FXD CAP2
715-011531-015 / AL Electrode
715-495014-001 / LIN, Chamber, TRASN, MANF, adapter
715-011051-001 / Frame chamber window
715-011039-001 / Retainer universal window
715-098591-001 / Pendulum V/V plate
715-098592-001 / ISO V/V Cover
715-12233-003 / Gate, INR HD ANDZ
715-330445-600 / PL Adapter upper match
715-032012-004 / Chamber body side plate EPD
715-330394-001 / Liner bracket
724-071981-002 / Blade, 6"
- / 9608 Wafer holder
- / Shower head, 6" alloy
715-360268-001 / PL, Chamber, TO V/V
839-331158-003 / Weldmt, top gas line
715-130080-005 / Wafer holder tight pocket, 5"
715-25106-001 / Plate, lower baffle
715-011202-001 / ELL Chamber
715-011532-006 / Plate upper seal, 6"
- / Showerhead, 6" alloy assy
715-11901-006 / Lower baffle domed, 6"
715-330889-002 / AL Ground ring
715-11900-001 / Upper baffle domed, 6"
715-074069-004 / Base plate
715-11492-006 / Exit arm, 6"
- / Cathode, 5"
715-330834-001 / Housing, lower reaction
715-011640-006 / Focus ring
715-011531-008 / Rainbow cathode
715-018991-006 / AL Cathode, 8"
715-018991-206 / AL Electrode
715-015169-011 / Liner, TMP shild, top gas anodized
715-443178-001 / Edge, hot
715-441352-001 / Chamber, hiflow TCP
715-370861-010 / ORF, SYL, 55 holes dia, 052
715-330394-010 / Bracket, chamber, liner, 9600
715-331211-002 / Liner, chamber, 9600
715-031454-001 / Chamber window cover
715-330928-002 / Liner PMP port o-shape
715-330981-001 / Liner window side TCP 9600
720-098325-001 / Plate socket screw
720-098325-001 / SCR, FLH, SOC, TI, vent
724-074076-005 / Seal plate
715-443223-002 / HPT Out focus ring
856-004863-003 / Bracket
- / Slit V/V liner (Hiflow TCP).
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