中古 EATON NOVA / AXCELIS Lot of spare parts #9288538 を販売中

Qty / Part number / Description (1) / 34214320001 / Power supply, arc discharge (1) / 3850-0371-0001 / Controller, pirani gauge TM220 (2) / 17B5814 / Screws, filament mounting (2) / 17189140 / Nuts, plate moly (20) / 4001167 / Springs, retaining rod inconel (2) / 17242340 / Gaskets, moly cup (1) / 17249700 / Tube, ring plasma shower (2) / 17135960 / Liners, shower tube (2) / 17242360 / Covers, base graphite (6) / 17269300 / Sleeves, insulating (4) / 17269310 / Sleeves, insulating (2) / 1906900 / Bellows, small, wafer holder (1) / 0342-0648-3001R / Column, ACCEL (4) / 1500-00165 / Belts, timing (1) / 1174090 / Disk, gsd, for 5 wafers (200) / 697300066203 / Screws, skthd cap, ss, vented, 6-32 x 3/8 / 6-32 x .3750 / Stainless steel (10) / 311100040001 / Insulators, filament for skm sources (6) / 311100050001 / Insulator, outer electrode for skm sources (4) / 311300150001 / Insulators, inner electrode for skm sources (1) / 155000170001 / Plate, arc chamber, top for skm sources (16) / 669200830001 / Rings, retainer clip composed of tungsten (1) / 1162710 / Arm, output, chuck assy 100 and 125mm / For 125mm wafers / High current implanters (2) / 90500231 / O-rings, silicone, arp-06-165 / 6.487 id x .103 w (1) / 763100010002 / Tube, ion gauge (10) / 84300072001 / Caps, arc chamber end cap (18) / 7230-0003-0014 / Insulators, porcelain (3) / 85400010001 / Cartridges, bion, ion exchange products (4) / 89600054001 / Chambers, arc source for NV3206 ion implanter (2) / 34203841001 / Feeds thru (2) / 728500020001 / Switches, atmosphere (11) / 100300050004 / Connectors, socket (10) / 100300060004 / Connectors, pin (1) / 0298-0128-0001 / Arm, chamber load for EATON medium current implanter (1) / 29801290001 / Arm, chamber unload for EATON medium current implanter (1) / 110006024 / Arm, load/unload pivot for EATON medium current implanter (15) / 7103-0036-3001 / Liners, magnet chamber inside upstream (1) / 7103-0041-4002 / Liner, magnet chamber outside radius (1) / 3110-0030-0001 / Insulator, suppressor (4) / 6400265 / Rectifiers, diode (33) / 17032830 / Bushings, insulator, enhanced sce (3) / 1789810 / Plates, end 2 hole arc chamber (6) / 1900400 / Filaments, electron shower 19 flat (1) / 3300008 / Gauge, vacuum t/c 6343/004 (black top) (12) / 3500243 / O-rings, belt, arp-026, polyurethane / 1-1/4 x 1-3/8 x 1/16 , 70 durometer / manuf p/n: -026 polyurethane (6) / 3500241 / O-rings, belt, arp-028, polyurethane / 1-3/8 x 1-1/2 x 1/16 , 70 durometer / manuf p/n: -028 polyurethane (10) / 3500242 / O-rings, belt, arp-045, polyurethane / 4 x 4-1/8 x 1/16 , 70 durometer / manuf p/n: -045 polyurethane (2) / 3500239 / O-rings, belt, arp-044, polyurethane / 3-3/4 id x 3-7/8 od x 1/16 w, 70 duro (2) / 1717480 / Plates, arc chamber top (5) / 34202564001 / Boards, source terminal data link (42) / 3110-0015-2001 / Insulators, filament source (1) / 3300002 / Tube, ion - hcig nonex (4) / 3100-0012-0001 / Inserts, emissive (8) / 34203693001 / Filaments, buss.