中古 AMAT / APPLIED MATERIALS Lot #9229538 を販売中

Lot of spare parts: Qty / Part number / Description (1) / 0190-13313 / Cable, assy 300mm chm convectron gauge (2) / 0190-13442 / ASYST, LPT2200 Gripper kits for non-standard (1) / 0190-18019 / Harness, assy rf relay conn lid hdpc (3) / 0190-18114 / Cables, assy rf match to hv dc uhf ultima hdp (1) / 0190-20045 / T/c wafer (1) / 0190-21054 / Cable, assy rf match preclean ii (1) / 0190-21305 / Cable, assy purch spec 60ft ion gauge (20) / 0190-21312 / Texturing fixtures (1) / 0190-21446 / Cable, assy purch spec 60ft stabil ion gauge (2) / 0190-22008 / Tc wafer, 8" snnf p+ flat cables sens array corp p/n 1530a-8-0095 (2) / 0190-35083 / Water flows switch 05 gpm (6) / 0190-35086 / Assy bellows upper mag coupled rotation (30) / 0190-35122 / Lamps, sylvania tungsten halogen lamp 750jkt 750w 120v 54860-0 (4) / 0190-35124 / Heaters valve jungle nitr (49) / 0190-35127 / Lamps, osram 410q/jkt/2pin/am 410w 82v (1) / 0190-35158 / Spec xfmr emo (1) / 0190-35186 / Heater (1) / 0190-35188 / Heater, upper exhaust (1) / 0190-35190 / Heater, cap exhaust (3) / 0190-35198 / Optical sensors (3) / 0190-35200 / O-Rings, viton (3) / 0190-35243 / Heaters (1) / 0190-35259 / Cable, assy rf coax, dps centura (2) / 0190-35370 / Thermocouples (4) / 0190-35386 / High emissivity wafers, 150 mm (1) / 0190-35439 / Water flow switch (1) / 0190-35440 / Water flow switch (48) / 0190-35451 / Lamps, assy d-base plug, 410q/jkt/2pin/am 410w 82v (2) / 0190-35511 / Assy,thermocouple,txz,mcvd (1) / 0190-35519 / Cable, assy heater, plumbing exhaust (56) / 0190-35602 / Bulbs, w/2 pins 750 w (2) / 0190-35615 / Tc, assy heaters (1) / 0190-35634 / Heater drivers (116) / 0190-35701 / Lamps, ushio halogen lamp jih120v-2000wb1/am (1) / 0190-35893 / Dielectric/silicon etch mainframe online technical manuals (2) / 0190-36006 / Screws, drive dps throttle valve (1) / 0190-36147 / Flow sensor (1) / 0190-36183 / Screw, drive, throttle valve, dps (12) / 0190-36184 / Screws, drive dps throttle valve (2) / 0190-36184 / Screws, drive dps throttle valve (1) / 0190-36320 / E-corner (2) / 0190-36626 / Endpoint detectors, mks on-line products process sense model # epdi-704 (1) / 0190-36630 / Applied materials, dielectric legacy srn (windows 95/nt) (2) / 0190-40011 / Pneumatic mainfolds (3) / 0190-40029 / Cable, assy bias generators (1) / 0190-40045 / PCB, vme single board computer gms v36-d with manual (5) / 0190-40104 / Fiber optic cables (2) / 0190-40131 / Cables, assy test, sq, r/a (5) / 0190-70003 / Cables, assy blade vac (38) / 0190-70044 / Valves (9) / 0190-70044 / Valves solenoid 1/16" orifice 6" (1) / 0190-70060 / Magnet driver (1) / 0190-70060 / Magnet driver (1) / 0190-70061 / Laminar flow ulpa media 50/60 hz 340 cfm (1) / 0190-70080 / ENI OEM-12 b-02 rf generator (1) / 0190-70103 / PCB, assy analog monitor light pen (1) / 0190-70106 / Endura hp pvd manual set cdrom (1) / 0190-71029 / Vent diffusion, upper (6) / 0190-71029 / Vent diffusions, upper (4) / 0190-76042 / Bearings (6) / 0190-76042 / Bearings (2) / 0190-76048 / Eni oem 12 b-07 rf generators (1) / 0190-76048 / Eni oem 12b-07 rf generator (1) / 0190-77062 / PCB, digital i/o (2) / 0200-00013 / Ring, quartz 150mm (1) / 0200-00019 / Collar, pedestal 125 mm ox/mlr (6) / 0200-00019 / Collar, pedestal 125 mm ox/mlr (2) / 0200-00025 / Gas ring, xtal (1) / 0200-00025 / Gas ring, xtal (24) / 0200-00032 / Injectors (2) / 0200-00034 / Covers, quartz (4) / 0200-00036 / Rings, cover, rim 4,5,6 oxide (1) / 0200-00043 / Cover, quartz poly 150 mm (1) / 0200-00047 / Ring, clamp 150 mm mlr (15) / 0200-00047 / Clamp rings (2) / 0200-00049 / Rings, 125 mm co-planar lower (1) / 0200-00050 / Ring, pedestal 125 mm (3) / 0200-00058 / Gas rings, small holes & channel (15) / 0200-00058 / Gas rings, small holes & channel (1) / 0200-00069 / Clamp ring, mlr co-planar (3) / 0200-00070 / Rings, quartz (1) / 0200-00071 / Insulation pipe, 200mm (1) / 0200-00071 / Insulation pipe, 200 mm (27) / 0200-00071 / Insulation pipes, 200 mm (1) / 0200-00075 / Cover, quartz 150 mm (5) / 0200-00195 / Rings, pedestal 200 mm (39) / 0200-00221 / Insulators, pinless 200 mm snnf preclean ii (3) / 0200-00221 / Insulators, pinless 200 mm snnf preclean ii (8) / 0200-00226 / Housings (1) / 0200-00262 / Center gas feed dome (1) / 0200-00317 / Isolator, ring (1) / 0200-00337 / Sapphire window (1) / 0200-00426 / Plate (1) / 0200-00667 / Liner, ceramic middle, pmd sacvd 300 mm (1) / 0200-00700 / Tube, adapter liner (1) / 0200-00811 / Injector, gas, blank-off emax (1) / 0200-00850 / Ring, cover (1) / 0200-00873 / Clamp, upper (2) / 0200-00917 / Injectors, gas (15) / 0200-01478 / Injectors ef/sp (1) / 0200-01954 / Deposition ring (2) / 0200-01955 / Deposition rings, 200 mm sip ta/tan (2) / 0200-02007 / Deposition ring (1) / 0200-02107 / Deposition ring (2) / 0200-02137 / Deposition rings (1) / 0200-03494 / Partition, quartz bridge pk enabler (1) / 0200-03598 / Blank lid, photo mask tetra ii (3) / 0200-04180 / Covers, quartz 200 mm (1) / 0200-08167 / L-collar, si-sic 15mm step, e5 (1) / 0200-08742 / Shadow ring, quartz 200mm (70) / 0200-09002 / Window, slits (4) / 0200-09005 / Windows (3) / 0200-09021 / Shields, ceramic (1) / 0200-09024 / Window, quartz (2) / 0200-09038 / Electrode (1) / 0200-09046 / Susceptor arm (131) / 0200-09049 / Screw, ceramic (5) / 0200-09050 / Collar, support (7) / 0200-09062 / Cover ring, sputter (1) / 0200-09072 / Shield, ceramic (2) / 0200-09074 / Window, heater universal chamber (11) / 0200-09076 / Support, susceptor (1) / 0200-09081 / Window, view port ampule (2) / 0200-09082 / Shield, 200 mm sputter etch (1) / 0200-09082 / Shield, 200 mm sputter etch (5) / 0200-09086 / Ring, quartz 200 mm sputter etch (1) / 0200-09086 / Ring, quartz 200 mm sputter etch (1) / 0200-09087 / Ring, quartz 150 mm sputter etch (2) / 0200-09088 / Ring, quartz 125 mm sputter etch (3) / 0200-09090 / Ring, graphite (1) / 0200-09090 / Ring, graphite (1) / 0200-09091 / Ring, graphite 150 mm (1) / 0200-09092 / Ring, graphite 125 mm (1) / 0200-09129 / Isolator, 200 mm wb (1) / 0200-09135 / Adapter, plumbing plate 150 mm (2) / 0200-09135 / Adapter, plumbing plate 150 mm (4) / 0200-09135 / Adapter, plumbing plate 150 mm (23) / 0200-09135 / Adapter, plumbing plate 150 mm (9) / 0200-09146 / Pin wafer lift (1) / 0200-09182 / Adapter, pumping plate 200 mm (2) / 0200-09182 / Adapter, pumping plate 200 mm (1) / 0200-09187 / Cover, quartz ext poly (6) / 0200-09187 / Cover, qtz 8 ext, poly, 44 mm (5) / 0200-09188 / Cover, quartz 200 mm ext (4) / 0200-09188 / Cover, quartz 200 mm ext (7) / 0200-09190 / Gas ring, 96 hole (13) / 0200-09190 / Gas ring, 96 hole (2) / 0200-09199 / Tube, plasma quartz (14) / 0200-09199 / Tube, plasma quartz (3) / 0200-09200 / Plate, gas dist, upper, quartz, 8" (2) / 0200-09202 / Plasma, tube ceramic (1) / 0200-09212 / Window, quartz (1) / 0200-09214 / Pedestal (1) / 0200-09217 / Ring, quartz 200mm (1) / 0200-09217 / Ring, quartz 200 mm ext cathode (2) / 0200-09219 / Cover ring, quartz 125 mm metal etch (1) / 0200-09219 / Cover ring, quartz 125 mm metal etch (1) / 0200-09220 / Ring, cover (2) / 0200-09222 / Ring, external 200 mm (1) / 0200-09231 / Support, susceptor (1) / 0200-09233 / Arm susceptor (1) / 0200-09235 / Collar (26) / 0200-09242 / Plug, dc graphite cr version poly (1) / 0200-09243 / Cover, pedestal quartz (1) / 0200-09250 / Cover, quartz 200 mm (1) / 0200-09266 / Shadow ring, inner (10) / 0200-09266 / Shadow ring, inner (1) / 0200-09270 / Tc, quartz (1) / 0200-09273 / Ring, inner 100 mm (7) / 0200-09273 / Ring, inner 100mm (1) / 0200-09278 / Ring, inner (1) / 0200-09281 / Ring, inner (1) / 0200-09303 / Inner, ring (1) / 0200-09303 / Inner, ring (3) / 0200-09305 / Shield (1) / 0200-09307 / Shield (1) / 0200-09316 / Inner, ring (1) / 0200-09317 / Ring, inner (1) / 0200-09318 / Ring, inner 200 mm (5) / 0200-09318 / Ring, inner 200 mm (1) / 0200-09331 / Shield (1) / 0200-09335 / Liner gas distibution (1) / 0200-09335 / Liner gas distibution (2) / 0200-09336 / Gas distribution plate (2) / 0200-09337 / Gas distribution cover (1) / 0200-09340 / Shield (1) / 0200-09342 / Ring, 125 mm (2) / 0200-09342 / Ring, 125 mm (8) / 0200-09343 / Collar, si ox/mlr/nit 125 mm flat (1) / 0200-09358 / Susceptor arm (2) / 0200-09373 / Cover, quartz 150 mm (1) / 0200-09373 / Cover, quartz 150 mm (1) / 0200-09411 / Ring cover,150 mm wsi (1) / 0200-09423 / Cover,quartz 200 mm (1) / 0200-09424 / Focus ring, quartz alum 200 mm 134 ht (2) / 0200-09426 / Ring, focus qtz, 200 mm (3) / 0200-09428 / Support susceptor, 200 mm bwcvd (64) / 0200-09432 / Tube, applicator (3) / 0200-09441 / Window, slit prsp (3) / 0200-09442 / Lift, wafer bwcvd (1) / 0200-09445 / Liner, qtz upper gas, dist asp chamber (1) / 0200-09446 / Liner, qtz lower gas dist asp chamber (8) / 0200-09467 / Pick-up (4) / 0200-09468 / Ring, cover sxtal (1) / 0200-09468 / Ring, cover, stal, 200mm notch, 228 hole (13) / 0200-09468 / Ring, cover, stal, 200 mm notch, 228 hole (5) / 0200-09483 / Collar (3) / 0200-09483 / Collar (2) / 0200-09495 / Shield (3) / 0200-09506 / Ring, quartz 200 mm (2) / 0200-09515 / Cover, quartz 200 mm poly (4) / 0200-09515 / Cover ring (3) / 0200-09517 / Finger (18) / 0200-09533 / Clamp ring, 150/147 (4) / 0200-09536 / Clamp ring (1) / 0200-09536 / Clamp ring (1) / 0200-09545 / Ring, clamp (3) / 0200-09554 / Cover, qtz 200mm (5) / 0200-09554 / Cover, qtz 200 mm (1) / 0200-09557 / Ring, focusing, qtz (1) / 0200-09557 / Ring,focusing,qz,150 mm poly,extcath (20) / 0200-09564 / Collar support (1) / 0200-09567 / Shield, 200 mm delta nitride (9) / 0200-09567 / Shield, 200 mm delta nitride (3) / 0200-09572 / Collar, si 200 mm (2) / 0200-09589 / Gas distribution plate (2) / 0200-09603 / Quartz pipe (41) / 0200-09605 / Bias plug (2) / 0200-09605 / Bias plug (4) / 0200-09612 / Cap, 1/4 turn (3) / 0200-09613 / Cover, top (1) / 0200-09615 / Lift, ceramic wafer (1) / 0200-09615 / Ceramic hoop (4) / 0200-09616 / Cover, bottom (1) / 0200-09620 / Ring, clamp (2) / 0200-09628 / Gas plate, qtz sxtal 13 hole (1) / 0200-09638 / Cylinder,qtz,200mm ext cath, ceramic (5) / 0200-09660 / Clamp, qtz (8) / 0200-09666 / Clamp ring, ceramic (7) / 0200-09678 / Ring, focusing 70 quartz, alum, 150 mm (3) / 0200-09687 / Ring, focusing (2) / 0200-09693 / Clamp ring (50) / 0200-09696 / Finger, flange (2) / 0200-09707 / Ring, centering (17) / 0200-09716 / Heater pin, wxz (5) / 0200-09734 / Cover, pedestal (1) / 0200-09735 / Cover, clamp ring 150mm (3) / 0200-09741 / Focusing ring, quartz (3) / 0200-09743 / Ring, focusing 150 mm (3) / 0200-09743 / Ring, focusing 150 mm (1) / 0200-09746 / Collar al 200mm ceramic (1) / 0200-09747 / Clamping ring (2) / 0200-09761 / Clamping ring (1) / 0200-09762 / Ring, clamping, notch, al, 200mm, 138 h (2) / 0200-09764 / Collar, 200 mm (11) / 0200-09764 / Collar (1) / 0200-09768 / Isolator, wsix (1) / 0200-09769 / Focus ring, quartz al 125 mm (76) / 0200-09772 / Filter, slit window quartz (5) / 0200-09809 / Ring, 150mm (3) / 0200-09818 / Ring, pedestal (2) / 0200-09818 / Ring, pedestal (1) / 0200-09825 / Pedestal, shield al 125 mm (1) / 0200-09827 / Ring, pedestal esc 200 mm (4) / 0200-09830 / Ring pedestal, esc (1) / 0200-09831 / Ring, focus (5) / 0200-09833 / Ring, focus esc (1) / 0200-09833 / Ring, focus 150/162 mm (4) / 0200-09835 / Centering, ring 200 mm (3) / 0200-09840 / Ring (2) / 0200-09852 / Ring, centering (1) / 0200-09855 / Dist, outer 125 sgd (1) / 0200-09856 / Dist, inner 125 sgd (9) / 0200-09869 / Clamping ring, 125 mm (5) / 0200-09869 / Ring, clamping flat al, 125 mm (4) / 0200-09898 / Plug, bias (7) / 0200-09920 / Ring, clamp (2) / 0200-09929 / Window qtz (1) / 0200-09965 / Universal arm (1) / 0200-09966 / Collar, quartz (3) / 0200-09970 / Window, sapphire, pumping plate (2) / 0200-09974 / Shield, l-support, pumping insert (3) / 0200-09977 / Cover (285) / 0200-09993 / Button, ceramic (1) / 0200-09994 / Ring inner, aln, 8"/5mm, jmf,201,wxz (5) / 0200-09996 / Ring, outer wxz (6) / 0200-09996 / Ring, outer, wxz (5) / 0200-10006 / Wafer, aln 150 mm jmf wxz (3) / 0200-10017 / Sgd, outer 125" (10) / 0200-10036 / Ring, middle (2) / 0200-10038 / Ring (7) / 0200-10039 / Outer ring (1) / 0200-10041 / Quartz cover,outer, 8”, step 3,esc (1) / 0200-10042 / Quartz cover,inner, 8”, notch,step3,esc (2) / 0200-10054 / Ring, inner wxz (1) / 0200-10055 / Cover ring, quartz al 100mm (15) / 0200-10055 / Cover ring, qtz 100 mm (3) / 0200-10064 / Ring cent 200/194 mm (3) / 0200-10073 / Insulator, quartz 200 mm (7) / 0200-10106 / Ring, outer (5) / 0200-10109 / Cover, lock, plasma chuck (1) / 0200-10110 / Cover, arm (1) / 0200-10112 / Tc keeper, ceramic (2) / 0200-10118 / Arm, plasma chuck (2) / 0200-10118 / Arm, plasma chuck (2) / 0200-10122 / Ring, isolator (1) / 0200-10143 / Insert, ring ceramic, dxz chamber (1) / 0200-10147 / Insert (1) / 0200-10170 / Window, quartz dxz (1) / 0200-10170 / Window, quartz dxz (1) / 0200-10173 / Plate, cover, 8" heater, dxz, alum (1) / 0200-10178 / Collar base (1) / 0200-10180 / Pipe, quartz lowered cathode (1) / 0200-10187 / Ring (1) / 0200-10192 / Shield, delta nitride 200 mm (2) / 0200-10196 / Shield, tapered 125 mm (15) / 0200-10202 / Ring, graphite 200 mm sputter/etch (1) / 0200-10218 / Clamp, ring 150 mm (1) / 0200-10231 / Ring, clamp ceramic, 150/147 mm (1) / 0200-10231 / Ring, clamp ceramic, 150/147 mm (1) / 0200-10239 / Clamp, ring 200 mm (2) / 0200-10246 / Gas distribution, quartz (12) / 0200-10263 / Washer, insulating ceramic (1) / 0200-10285 / Pin, lift (9) / 0200-10293 / Window, solid al (7) / 0200-10348 / Window, heater sapphire coated (1) / 0200-10363 / Focus ring (1) / 0200-10368 / Cover (1) / 0200-10380 / Ring, focus (1) / 0200-10392 / Window, endpoint mxp poly etch (1) / 0200-10412 / Ring, focus (1) / 0200-10413 / Ring, focus (1) / 0200-10414 / Ring, focus (3) / 0200-10447 / Shadow ring, quartz, 200 mm flat (2) / 0200-10478 / Collar (28) / 0200-10536 / Lift pin (2) / 0200-10540 / Source, si (1) / 0200-10555 / Base plate, quartz (1) / 0200-10648 / Tubing, alumina (2) / 0200-14009 / Plate, 7 side (3) / 0200-14013 / Plate (5) / 0200-15004 / Shield, 150 mm bwcvd (12) / 0200-15005 / Pin, wafer lift 100 mm universal chamber (1) / 0200-18018 / Collar, 200 mm (1) / 0200-18019 / Cover (7) / 0200-18037 / Collars, bottom 200 mm snnf (1) / 0200-18067 / Insulator, hdpcvd (1) / 0200-18078 / Collar, 200 mm snnf ultima (6) / 0200-18085 / Nozzles, ceramic (2) / 0200-20001 / Doors, preclean (2) / 0200-20002 / Insulators, quartz (16) / 0200-20004 / Antenna flakes (4) / 0200-20005 / Shields, quartz (1) / 0200-20030 / Single chamber, dome (1) / 0200-20055 / Insulator, 8" w/antenna pc ii (1) / 0200-20055 / Insulator, 8" w/antenna pc ii (2) / 0200-20056 / Insulators, ti pedestal (1) / 0200-20064 / Insulator, qtz (31) / 0200-20073 / Pins, pc ii insulator (17) / 0200-20137 / Pins, insulator (7) / 0200-20170 / Caps, coil support (3) / 0200-20170 / Caps, coil support (6) / 0200-20175 / Labyrinths, rigid coil support vectra imp (3) / 0200-20217 / Feedthru, labyrinth (4) / 0200-20217 / Feedthru, labyrinth (3) / 0200-20291 / Rest buttons (3) / 0200-20365 / King coffins (8) / 0200-20376 / Feedthru, labrinth (1) / 0200-20437 / Deposition ring, 300 mm (3) / 0200-20439 / Coils, insulator (1) / 0200-20498 / Ceramic (2) / 0200-20500 / Feedthru (1) / 0200-20507 / Water meter (1) / 0200-35007 / Dome, upper (1) / 0200-35019 / Insert, quartz (1) / 0200-35086 / Ring, preheat (2) / 0200-35086 / Rings, preheat (1) / 0200-35086 / Ring, preheat (2) / 0200-35086 / Rings, preheat (2) / 0200-35113 / Susceptor rotation 200 mm epi (3) / 0200-35113 / Susceptor rotation 200 mm epi (14) / 0200-35127 / Pins, wafer lift (4) / 0200-35160 / Insert, quartz 3 zones (2) / 0200-35162 / Liners, chamber, upper, brkt/ (1) / 0200-35208 / Shaft, susceptor (2) / 0200-35208 / Shaft, susceptors (8) / 0200-35256 / Rings, preheat (70) / 0200-35281 / Wafer lift pins (10) / 0200-35306 / Guide pins, quartz (6) / 0200-35320 / Ring focuses, flat 195 mm (1) / 0200-35324 / Ring, 195mm90 (1) / 0200-35324 / Ring, 195 mm (1) / 0200-35325 / Focus ring (1) / 0200-35325 / Focus ring (3) / 0200-35334 / Windows, view poly dps (1) / 0200-35359 / Susceptor, 200 mm (1) / 0200-35390 / Ring, single esc 195 mm (3) / 0200-35420 / Arm susceptors, tin-xp (19) / 0200-35440 / Lift pins (3) / 0200-35460 / Adapter rings, 200 mm (2) / 0200-35566 / Clamping rings (3) / 0200-35576 / Isolators lid, txz (1) / 0200-35579 / Insert, txz (1) / 0200-35595 / Liner, lid txz (1) / 0200-35605 / Focus ring, 845ht, 195 mm, r2 chamber (2) / 0200-35671 / Support cylinders (1) / 0200-35690 / Susceptor, solid pin 200 mm (1) / 0200-35693 / Blade, ceramic (1) / 0200-35693 / Blade, ceramic (2) / 0200-35771 / Resistors (3) / 0200-35780 / Quartz pins, standoff, cooldown (3) / 0200-35782 / Shadow rings, 200 mm flat (2) / 0200-35785 / Hoop ceramics (2) / 0200-35842 / Pumping rings, ceramic c-shape giga-fill (1) / 0200-35843 / Pumping ring, ceramic top giga-fill sac (1) / 0200-35862 / Window, slit (2) / 0200-35867 / Applicator tubes (1) / 0200-35882 / Focus ring (1) / 0200-35884 / Focus ring (3) / 0200-35884 / Focus rings (41) / 0200-35935 / Lift pins (2) / 0200-35973 / Rings (1) / 0200-36035 / Pad (1) / 0200-36092 / Window, 300 mm (3) / 0200-36122 / Isolators (1) / 0200-36415 / Pumping ring, ceramic c-shaped dxz sacvd (2) / 0200-36425 / Applicator tubes, ceramic (7) / 0200-36428 / Tube, ceramic gas feed (1) / 0200-36461 / Window, anti clouding sapphire (1) / 0200-36630 / Plate, cover, 8" heater, dxz, alum (30) / 0200-36661 / Guide heaters (1) / 0200-36679 / Blade,ceramic e hp-cr robot (1) / 0200-36780 / Isolator, pumping ring bottom 200 mm sacvd (18) / 0200-39134 / Windows, endpoint (2) / 0200-39198 / Inner gas feed nozzles (3) / 0200-39199 / Outer gas feed nozzles (2) / 0200-39281 / Plate guides (2) / 0200-39282 / Screw, center plates (2) / 0200-39287 / Rf isolators (2) / 0200-39347 / Shadow rings, 150 mm flat (1) self alig (3) / 0200-40012 / Cover plates (3) / 0200-40018 / Clamp rings, 200 mm (1) / 0200-40027 / Cover plate, si 125 mm (2) / 0200-40037 / Cover plates, 150 mm (2) / 0200-40039 / Cover plates (1) / 0200-40040 / Clamp ring, 125 mm (1) / 0200-40062 / Clamp ring, 150 mm (1) / 0200-40063 / Cover plate, 125 mm (1) / 0200-40066 / Clamp ring, 125 mm (1) / 0200-40071 / Cover plate (5) / 0200-40080 / Clamps, esc 200 mm (1) / 0200-40080 / Clamp, esc 200 mm (5) / 0200-40086 / Collars, esc 200 mm (8) / 0200-40086 / Collars, esc 200 mm (1) / 0200-40093 / Cover, 200 mm (1) / 0200-40095 / Clamp ring (1) / 0200-40097 / Spacer, 150 mm (2) / 0200-40102 / Wall covers (2) / 0200-40103 / Covers, 150 mm e-chuck (1) / 0200-40104 / Cover, 150 mm e-chuck (1) / 0200-40105 / Wall cover (5) / 0200-40120 / Spacers, 200 mm (23) / 0200-40183 / Spacers (1) / 0200-76017 / Window (16) / 0200-76023 / Pins, cooldown pedestal (11) / 0200-89017 / Lift pins (1) / 0222-10420 / Casette handler top, 8" ces (11) / 0224-01117 / O-Rings (4) / 0224-01190 / Filters (1) / 0224-01774 / PCB, rf on dxz/hdp (8) / 0224-41833 / O-Rings (1) / 0224-43065 / Weldment (1) / 0224-43307 / Universal lid, assy cvd common silane (1) / 0224-43653 / Endpoint signal monitor bezel (1) / 0224-43946 / PCB for 6 tylan mfc's (3) / 0224-46286 / Cable (1) / 0224-49095 / O-Rings (2) / 0225-04127 / Cables, adaptor, stec mfc (2) / 0225-05714 / Blank-off (1) / 0225-09247 / Harness, assy ces, rf interlock (1) / 0225-10571 / Relay (1) / 0225-10778 / Valve, metering 1/4m vcr (1) / 0225-15036 / O-Ring, kalrez # 227 (2) / 0225-15082 / O-Rings, kalrez # 250, 4079 (16) / 0225-15083 / O-Rings, kalrez # 135, 4079 (2) / 0225-15084 / O-Rings, kalrez # 3422, 4079 (13) / 0225-15149 / O-Rings, kalrez # 030, 2037 (5) / 0225-16243 / O-Rings, viton (1) / 0225-16383 / Flow meter (1) / 0225-31093 / PCB, 5 lamp tower board (30) / 0225-31168 / Bulbs (6) / 0225-33879 / Pressure transducers, span model # stp205 0-5 vdc (1) / 0225-33895 / Filter (1) / 0225-34457 / PCB, modified dryvac distribution (2) / 0225-40018 / Switches (3) / 0225-97432 / O-Rings (1) / 0226-09001 / Cable, assy emo (1) / 0226-09004 / Cable, assy (1) / 0226-10037 / Cable, assy smif arm interface (6) / 0226-10491 / O-Rings.