中古 AMAT / APPLIED MATERIALS Lot #9087591 を販売中

Lot of spare parts for 8300, P5000, Centura, and Endura systems: Qty P/N Description (2) 676300 Hanger, Quartz (1) 21016500001 Fiber optic cable (1) 70509031000 AI.Gasket for gun head (1) 0010-00138 Upper frame, AC distribution assy. (4) 0010-00198 Reflector socket, Assy. (2) 0010-00330 Pressure switch (1) 0010-00332 Pressure switch (90) 0010-00339 Pedestal (1) 0010-00343 Pedestal, 125 mm (1) 0010-00388 Pedestal (2) 0010-00410 Gripper, Assy. (2) 0010-00482 A.C. Outlet, Assy. (1) 0010-00534 Hinge, Assy. Position A&D (2) 0010-00571 Feedthru, Assy. (5) 0010-00651 Mount, Fiber optics (1) 0010-00682 Screen, Assy. (2) 0010-00685 Actuator assy. standard cathode (2) 0010-00742 Keyboard, Assy. thure the wall (3) 0010-00764 Blade, 150 mm (10) 0010-00793 Wiper, Assy. (871) 0010-00805 Clip, Pedestal (210) 0010-00840 Clip, Assy. (1) 0010-01070 Tray, Support assy. (1) 0010-01098 Reflector, Assy. 200 mm (2) 0010-01100 Source, Locking pin assy. (1) 0010-01322 Slit door, SHO corroson resistant (2) 0010-02017 Manifold DI (1) 0010-05836 Door, Assy. Slit valve (2) 0010-09019 Throttle valve (1) 0010-09021 I/O slit valve, Assy. (1) 0010-09063 Calabration display box, Assy. (1) 0010-09092 Ozonator, Assy. (1) 0010-09119 Throttle valve drive, Assy. (3) 0010-09125 Calibration head, Assy. 200 mm (2) 0010-09125 Head assy. (1) 0010-09174 Throttle valve, Assy. (1) 0010-09183 Heat sink, Assy (2) 0010-09418 Hose, Nelab (1) 0010-09487 Endpoint detector/sensor (1) 0010-09499 Hinge (1) 0010-09559 Pedestal, Assy. (3) 0010-09610 TC/ wafer support assy. (1) 0010-09662 Susceptor, 200 mm BWCVD (1) 0010-09732 Pedestal (1) 0010-09789 Bearing, Assy. (3) 0010-09818 Susceptor, 100 mm BWCVD (1) 0010-09881 Bracket remote, Assy N2/mid-fill valves (2) 0010-09936 Connector, HV module (1) 0010-10038 N2 doping kit, Assy. (4) 0010-10045 Pump stack htr. AC, Assy. (1) 0010-10128 Susceptor, assy. BWCVD 200 mm (1) 0010-10139 Hinge, Assy (1) 0010-10141 Wafer position sensor, Assy. (1) 0010-10327 Mxp+ep esc assy, 200 mm (1) 0010-10436 AC distribution, Assy. (1) 0010-10776 RFG output adapter, Assy. (3) 0010-10902 Connector, HV module, Assy. (1) 0010-14029 Power drawer, Assy. (1) 0010-16144 Light pen switch, Assy. (1) 0010-18213 Lockout valve, Assy. (2) 0010-20015 Lift, Assy. orienter (2) 0010-20101 Door, Assy. slit valve (2) 0010-20143 Potentionmeter, Assy. (1) 0010-20163 Shield, Chamber (2) 0010-20169 Phase/mag, RF match (1) 0010-20230 Orientor, Lift (1) 0010-20251 Laser optics, Assy. (1) 0010-20292 LLB Right detector, Assy. (5) 0010-20292 LLB Right detector, Assy. (1) 0010-20358 Monolith double, Assy. (1) 0010-20407 Detector, Assy. LLA RT (2) 0010-20407 Detector, Assy. LLA RT (2) 0010-20441 RF Match, Assy. 6 " (1) 0010-20858 Remote pin light third monitor (1) 0010-21566 Slit valve door and mount, Assy. (1) 0010-21716 Shield (21) 0010-21952 Short monitor, Non collimated (1) 0010-30001 Degasser, Assy. (6) 0010-30059 Pedestal, 200 mm (4) 0010-30095 Hose, Assy. (3) 0010-30229 Hot analyzer (1) 0010-30249 Hose, SS (2) 0010-30366 Sm. Tower, Assy. (1) 0010-30532 Hose (1) 0010-35560 Hose, Assy SS AMAT-1 Heat exchanger (1) 0010-36202 Wafer lift pin, Assy. (1) 0010-36274 Assy, Plug probe hole (1) 0010-36564 Slit valve assy. (1) 0010-38188 Liner (1) 0010-38823 Valve, Slit actuator chemraz (6) 0010-39665 Valve (1) 0010-40155 Wafer sensor, Assy. (2) 0010-60013 Susceptor, BWCVD 125mm (1) 0010-70174 Remote electronics, Assy (2) 0010-70409 Optic, Assy 15 slot storage elevator (1) 0010-75173 Door (1) 0010-75174 Door, Slit valve anodized (1) 0010-75427 Cassette sensor assy. (1) 0010-76083 H-door, Assy. (1) 0010-76136 Lift, Assy. (2) 0010-76430 Assy, A.L.L. motor left (1) 0010-76559 Prom, Assy. (1) 0010-76599 DC bias, Assy (7) 0010-76893 Sensor, Assy. (9) 0010-90162 Resistor chain, Assy. (1) 0010-91472 Clip (12) 0010-92231 Moving clip, Assy. (3) 0015-00423 Bulb, Modified LT/BESC (8) 0015-01000 Gear (4) 0015-09067 Washer #4 spring NI plated (11) 0015-09076 Rod threaded (skins kit) (28) 0015-09078 Pulley (6) 0015-09094 Gear (1) 0015-09117 Motor, Throttle valve (1) 0015-09204 Valve, Modification (2) 0015-09209 Bellows (1) 0015-09279 Water leakage detector sumitomo 3m limited (5) 0015-09327 Screw, Mach BTN (36) 0015-09329 Screw, Button head (1) 0015-09330 Screw mach set 4-40 x 1/4 hex SKT SST NI (70) 0015-09424 Gear, Spur, Pin hub, Throttle valve (8) 0015-20022 Spanner wrench (4) 0015-20035 Screw (4) 0015-20039 Motor (2) 0015-20042 Screw, Clamp modified (2) 0015-20114 Sprocket , 45 teeth (1) 0015-35079 FTG, Short (1) 0020-00020 Quartz ring, 150 mm (5) 0020-00043 Insulator ring (1) 0020-00730 Geneva wheel (2) 0020-01024 Window (5) 0020-01138 O-ring (1) 0020-01145 Piston (1) 0020-02008 Flange (1) 0020-02218 Plate, Upper (5) 0020-03366 Shield (9) 0020-03394 Bracket, Upper coil (1) 0020-03412 Insert, 125 mm oxide (68) 0020-03426 Vespel plug (1) 0020-03431 Insert (1) 0020-03438 Clamp ring, Qtz. 150 mm (1) 0020-03438 Clamp ring 150 mm (53) 0020-03471 Spacer, Lead screw (3) 0020-03507 Cover (1) 0020-03551 Pipe, Nipple feed (1) 0020-03552 Body, Throttle valve (2) 0020-03552 Body, Throttle valve (153) 0020-03553 Cover, screw 1/4-20 (3) 0020-03554 Screen plate, Aluminum (3) 0020-03578 Cover, Feedthru (1) 0020-03581 Hinge, Pivot (1) 0020-03607 Cover (3) 0020-03636 Screw (10) 0020-03660 Screw, Vespel (10) 0020-03674 Sleeve, Centering clamping (1096) 0020-03690 Finger, Flange (891) 0020-03697 Screw, Vespel (1) 0020-04039 Cover plate, RF (3) 0020-04041 Plate, Water box (1) 0020-04042 Bracket, Water box (3) 0020-04058 Ring pedestal, 200 mm ox (1) 0020-04059 Window, Round (60) 0020-04061 Mask, Filter (1) 0020-04074 Window (2) 0020-04124 Cover, HE Feedthru (3) 0020-04129 Bracket, Top hinge (9) 0020-04142 Rim (8) 0020-04143 Sleeve, Center clamping ring (2) 0020-04159 Pedestal, 200mm (1) 0020-04160 Spacer, Circular (2) 0020-04164 Carrier, 200mm (2) 0020-04167 Clamp cylinder (1) 0020-04189 Adapter top, Mark II chamber (5) 0020-04189 Adapter top, Mark II chamber (1) 0020-04190 Switch, Clamp (1) 0020-04194 Top lid (6) 0020-04196 Plate, Adapter (2) 0020-04259 Pedestal, 100 mm (5) 0020-04259 Pedestal, 100mm (1) 0020-04263 Shield (2) 0020-04278 Cylinder, Clamping (1) 0020-04478 Mounting strip (1) 0020-04483 Support pipe, Upper (1) 0020-04484 3 IPE support center (2) 0020-04485 Support pipe, Bottom (2) 0020-05809 Nut RF feedthur .250" wide vectra IMP (3) 0020-06047 Bearing, Throttle valve (1) 0020-06048 Bushing (2) 0020-06320 Hexoide,Lock washer (2) 0020-06425 Chamber mirror, Right (1) 0020-06425 Chamber mirror, Right (1) 0020-06430 Screw (2) 0020-06706 Bracket (30) 0020-06979 Stop, Lower (16) 0020-06997 Pedestal, 125mm oxide (6337) 0020-06998 Buttons (8) 0020-09015 Clamp ring, Qtz window (4) 0020-09039 Strip (2) 0020-09053 Flag, STD (1) 0020-09064 Window, Flange (3) 0020-09077 Mounting bracket (2) 0020-09077 Mounting bracket (1) 0020-09082 Strap, Ground (1) 0020-09083 Strap, Capacitor (1) 0020-09083 Strap, Capacitor (1) 0020-09085 Strap coil (11) 0020-09088 Spacer, Shaft (43) 0020-09088 Spacer, Shaft (15) 0020-09090 Blade, Coil (1) 0020-09094 Coil parter (2) 0020-09094 Coil parter (5) 0020-09111 Retainer seal (3) 0020-09124 Window (5) 0020-09127 Clamp, I/O valve (1) 0020-09131 Door, I/O slit (1) 0020-09136 Hanger, Lamp module (12) 0020-09144 Dector, Extension (1) 0020-09152 Bracket,Rotation motor (1) 0020-09188 Shoe, Front 125 mm (8) 0020-09200 Shoe, Rear (2) 0020-09224 Bracket (1) 0020-09237 Arm, Pivot (1) 0020-09263 Cover, Rear (3) 0020-09284 Flag, Comb sensor 3/16" pitch (1) 0020-09297 Bracket, Vertical plate mount (8) 0020-09302 Plug (26) 0020-09307 Bushing, Mounting (2) 0020-09346 Cap, Palm (1) 0020-09350 Bracket, Tube (1) 0020-09356 Plate cover (1) 0020-09364 Bracket (8) 0020-09365 Bracket, Lower (83) 0020-09377 Plate, Cover (1) 0020-09378 O-ring (23) 0020-09416 Shim (3) 0020-09434 Housing, Plug (1) 0020-09437 Clamp, Tube 2" frame member (1) 0020-09446 Gasket mag-AC (2) 0020-09521 Cover, Boomerang box (12) 0020-09523 Pin, Slit valve chamber (2) 0020-09530 Endcap, Hinge (1) 0020-09533 Handle, Gas box (120) 0020-09547 Flange, Vespel (50) 0020-09609 Bushing, Terminal (2) 0020-09610 Plate retainer (1) 0020-09622 Plug, Throttle valve (1) 0020-09666 Clamp, Hinge (36) 0020-09733 Screw (1) 0020-09748 Bracket (2) 0020-09749 Bracket (1) 0020-09816 Bracket, Rear mounting (2) 0020-09818 Rail (16) 0020-09843 Sleeve, Wafer pin (4) 0020-09843 Sleeve, Wafer lift pin (45) 0020-09848 Connector retainer (2) 0020-09881 Adapter, Manifold (3) 0020-09911 Carrier alignment tool (61) 0020-09912 Lift pin, Sputter (1) 0020-09913 Pedestal (4) 0020-09924 Support, Susceptor arm (1) 0020-09933 Gas distribution (98) 0020-09963 Screw, Vessel (1) 0020-09965 Block, Output (3) 0020-09970 Strap output (1) 0020-09998 Flange, Spacer (9) 0020-10042 Plate, Floating head (4) 0020-10047 Stand-off (14) 0020-10068 Tube, Light pen (2) 0020-10069 Tube receptacle, Light pen (1) 0020-10098 Cover, Plate (1) 0020-10117 Shower head, CVD (19) 0020-10127 Bushing (3) 0020-10141 Pumping plate, (1) 0020-10189 Plate connector (1) 0020-10194 Plate, Elevator tray tower (2) 0020-10202 Door, Chamber slit (4) 0020-10215 Detector, Extention 200 mm (2) 0020-10342 Restrictor block (6) 0020-10442 Plate, Fan cover (2) 0020-10518 Pedestal, Thick graphite (4) 0020-10573 Collimator, Inner WCVD (3) 0020-10573 Collimator, Inner WCVD (2) 0020-10667 Bracket, MTG HDD SXS controller (1) 0020-10700 Plug, Throttle valve teos (4) 0020-10702 Seal retainer (1) 0020-10718 Seal (12) 0020-10721 Screw, Cap (12) 0020-10729 Hanger, Lamp module (10) 0020-10738 Bracket (1) 0020-10739 Collimator (51) 0020-10762 Bushing isolator (1) 0020-10814 Pedestal (35) 0020-10886 Screw (97) 0020-10888 Set screw (29) 0020-10889 Screw, SLTD pan HD #6-32x3/8 (233) 0020-10890 Screw (85) 0020-10891 Screw (4) 0020-10909 Gear, Hinge (1) 0020-10943 Isolator, Teflon (14) 0020-11795 Seal, Water (2) 0020-13226 Recevier, Right (1) 0020-13289 Insert (5) 0020-13522 Wafer rest (6) 0020-13577 Screw (2) 0020-13652 Clamp, Viewport detector (1) 0020-14107 Base (2) 0020-14504 Flange (1) 0020-16020 Shaft (4) 0020-18068 Plate, Cassette (10) 0020-18086 O-ring, Teflon (3) 0020-18093 Foil pedestal (5) 0020-18137 Flag z, Direction HDP CVD (2) 0020-18269 Ring, Teflon, Guard THV HDP-CVD (1) 0020-18296 Block, Insulated water mainfold (1) 0020-18332 Motor mount (2) 0020-18333 Robot flag, Robot extension (1) 0020-18357 Arm lift (16) 0020-18899 Washer, Nozzle ultima HDPCVD (1) 0020-19707 Deposition ring (4) 0020-20114 Isolator, DC Bias (2) 0020-20119 Pad, DC bias (1) 0020-20124 Plunger. DC bias (1) 0020-20125 Hub, Heater bearing (1) 0020-20320 Lifter, 200 mm (1) 0020-20323 Chuck, 8" (2) 0020-20342 Pivot (2) 0020-20349 Duplex clamp, Frog leg blade (1) 0020-20390 Arm, Frog leg (2) 0020-20401 Flange (24) 0020-20462 Viewport cover (6) 0020-20499 Window, Protective (1) 0020-20500 Shield cryo, Round (1) 0020-20524 Hub, Left corner cover (9) 0020-20558 Blank, Slit valve (5) 0020-20579 Ext, Arm (1) 0020-20586 Insert, Preclean mod. (1) 0020-20626 Block, Mounting (1) 0020-20627 MFC universal mounting block (11) 0020-20651 Bracket guide source (1) 0020-20672 Chamber plug, Monolith (20) 0020-20673 Pin (1) 0020-20770 Stage cassette (1) 0020-20847 Bus bar main contactor (5) 0020-20882 Ground, Strip (3) 0020-20897 Socket retainer (3) 0020-20929 Insulator, Switch (1) 0020-20942 Shield, 200 mm (3) 0020-20943 Shield, Top 125-150 mm (1) 0020-20944 Shield, Top 200 mm (3) 0020-20962 8" Clamp ring (2) 0020-20962 Clamp ring, 200 mm (6) 0020-20971 Spacer, Tin (2) 0020-20986 Shield, Pedestal (1) 0020-20991 Panel, Turbo panel single NT 20 (25) 0020-21118 Insert (1) 0020-21144 Insert pedestal (2) 0020-21148 Hoop cover (1) 0020-21153 Bar (2) 0020-21200 Cover shield, Preclean (1) 0020-21286 Clamp ring, 150 mm (3) 0020-21320 Clamp ring, Collimator 200 mm (1) 0020-21364 Clamp ring (1) 0020-21453 Clamp ring , 150 mm (2) 0020-21464 Shield (1) 0020-21465 Shield (11) 0020-21484 Ground, Bushing (1) 0020-21487 Cover (2) 0020-21665 8" shield (1) 0020-21716 Plug (1) 0020-21725 Insulator, Preclean (1) 0020-21728 Seal ring, Preclean (1) 0020-21738 Hoop, preclean 200 mm (66) 0020-21744 Finger, 200 mm (1) 0020-21747 Insulator, Spacer (22) 0020-21753 Finger, 150 mm (2) 0020-21754 Pocket plate, 150 mm (2) 0020-21755 Clamp ring, 150 mm (10) 0020-21758 Finger, 150 mm (1) 0020-21759 Shield cover, 150 mm (1) 0020-21759 Shield cover, 150 mm (4) 0020-21826 Clamp, Viewport detector (2) 0020-21834 Housing (2) 0020-21863 Shim (1) 0020-21893 Shield (3) 0020-21900 Shield, 200 mm (1) 0020-21917 Pocket plate, 200 mm (29) 0020-21944 Pocket plate (7) 0020-22010 Cap, Lamp (2) 0020-22039 Bracket clamp source collimation (2) 0020-22062 Mag switch insulator (1) 0020-22124 Plate, Hinge mounting (15) 0020-22158 Plug (3) 0020-22196 Pedestal, 200 mm (1) 0020-22215 Pocket plate (3) 0020-22215 Pocket plate (1) 0020-22223 Pocket plate, Preclean (1) 0020-22223 Pocket plate, Preclean (1) 0020-22237 Cover ring (3) 0020-22241 Lift finger (2) 0020-22270 Finger, 150 mm preclean (1) 0020-22291 Shield (1) 0020-22292 Shield, 150 mm (1) 0020-22292 Shield, 150 mm (1) 0020-22453 Tool, Robot clamp (1) 0020-22476 Susceptor, 125 mm mac (2) 0020-22512 Pedestal, Rest button (1) 0020-22529 Plate, 200 mm (1) 0020-22551 Collimator, Bracket guide (1) 0020-22647 Shield (1) 0020-22671 Adaptor,13" Source shutter (1) 0020-22674 Holder, Magnet source (1) 0020-22700 Clamp ring (1) 0020-22802 Shield (2) 0020-22805 Plate adapter clamp. Wide body chamber (1) 0020-22814 Clamp ring (1) 0020-22821 Cover, Wafer map (10) 0020-22822 Screw (1) 0020-22844 Shield (4) 0020-22862 Hub, Shutter DC Bias (2) 0020-22898 Cover disc. (3) 0020-22906 Pin, Preclean pedestal (13) 0020-22906 Pin, Preclean pedestal (8) 0020-22906 Pin, Preclean pedestal (1) 0020-22993 Cover plate (1) 0020-23035 Cam (1) 0020-23041 Clamp shield (2) 0020-23043 Shield, Upper 8" (1) 0020-23043 Shield, Upper tin (2) 0020-23045 Shield / Tin coverage (9) 0020-23045 Shield, 101% Tin (3) 0020-23065 Pedestal, 150 mm tin 101% (1) 0020-23075 Shield, Upper (1) 0020-23095 Bracket (2) 0020-23110 Washer (1) 0020-23138 Bracket sensor (1) 0020-23165 Bracket, Connector (1) 0020-23180 Pedestal (1) 0020-23193 Trunnion short left (1) 0020-23235 Insert (5) 0020-23306 Gasket, Cryo (1) 0020-23354 Insulator, Quartz (2) 0020-23355 Pedestal (1) 0020-23355 Pedestal (14) 0020-23355 Pedestal (1) 0020-23478 Shield, Heater (1) 0020-23494 Honey comb collimator (11) 0020-23560 Shim (2) 0020-23585 Shield (22) 0020-23587 Spacer (2) 0020-23591 Tube, 5"/6"/8" (1) 0020-23922 Shaft (5) 0020-24011 Finger holder (7) 0020-24018 Pin, Poly si Qtz. Insulator (2) 0020-24090 Shield, Heater hot AL (2) 0020-24091 Leg heater (1) 0020-24095 Pedestal (1) 0020-24095 Pedestal (9) 0020-24386 Cover, 150 mm (1) 0020-24414 Upper interlock cover PC 2 cath Intlk (4) 0020-24594 Reflector (1) 0020-24768 Flange (1) 0020-24782 Stop actuator shutter linkage (2) 0020-24782 Stop, actuator shutter linkage (1) 0020-24798 CAM (1) 0020-24798 CAM (1) 0020-24804 Cover ring (1) 0020-25071 Clamp ring (1) 0020-25145 Cover (1) 0020-25257 Insulator Qtz (4) 0020-25313 Flange, Upper bellows N2 COH Tin (11) 0020-25624 Insulator (4) 0020-25731 Shield, Adaptor (1) 0020-25826 Pedestal, Cover 150 mm (3) 0020-25829 Bushing guide (6) 0020-25895 Insulator, Lamp cover right (14) 0020-25917 Isolator, DC bias (1) 0020-25920 Shield, Lower (1) 0020-26158 Clamping ring (1) 0020-26218 Pedestal (1) 0020-26262 Clamp ring (1) 0020-26399 Shield 8" low knee (3) 0020-26439 Shield, Lower (2) 0020-26450 Plate, End (2) 0020-26578 Clamp ring, 6" SMF (7) 0020-26578 Clamp ring, 6" SMF (8) 0020-26906 Shield (6) 0020-27100 Clamp,150 mm 4 pad (1) 0020-27136 Support, Actuator shutter linkage (2) 0020-27136 Support, Actuator shutter linkage (1) 0020-27275 Clamp ring (2) 0020-27309 Cover ring (2) 0020-27439 Deposition ring, 200 mm (1) 0020-27613 Plug, 200 mm (2) 0020-27805 Shutter disk (2) 0020-27812 Pin alignment, G-12 source frame (1) 0020-27884 Shim (1) 0020-28343 Plate TC box new degas (1) 0020-28561 Insulator (2) 0020-28743 Block, Water (33) 0020-28789 Spacer, Feed thru seal (2) 0020-28906 Hub, DC bias (2) 0020-28907 Isolator, Ceramic (1) 0020-29000 Shield upper, G-12 (1) 0020-29016 Hoop, Orientor degas 200 mm with TC (33) 0020-29077 Bushing guide (2) 0020-29125 Shield (5) 0020-29142 Cup, Inner coil support (6) 0020-29143 Cup outer (3) 0020-29335 Rest button, AVD-101 5.64 mm electrolized (6) 0020-29342 Feedthur nut (3) 0020-29348 Cup outer feedthru (2) 0020-29586 Insulator (4) 0020-29684 Insulator, Dual input (1) 0020-29836 Clamp (2) 0020-29836 Clamp (1) 0020-29966 Clamp ring (3) 0020-29966 Clamp ring (1) 0020-29975 Bar, RF connector .125"L (50) 0020-30000 Clamp pin (100) 0020-30008 Clamp, Shield (4) 0020-30073 Clamp cylinder, 200mm (4) 0020-30092 Ring, External (1) 0020-30101 Top plate, Gas box (1) 0020-30107 Perf. Plate, 150mm (1) 0020-30110 Collimator (1) 0020-30172 Housing, Endpoint detector (1) 0020-30173 Filter,Housing, Endpoint detector (3) 0020-30176 Spacer (1) 0020-30178 Sputter etch carrier (1) 0020-30205 Pedestal (9) 0020-30222 Adapter, Handle top cover (1) 0020-30223 Gas distribution plate (1) 0020-30226 Bracket, Switch (113) 0020-30228 Screen, Plasma (1) 0020-30291 H2O Manifold (265) 0020-30304 Screw, Alum (1) 0020-30314 Pedestal, Alum/poly/WSI 150 mm flat (2) 0020-30329 Screw (3) 0020-30342 Pedestal (2) 0020-30342 Pedestal (53) 0020-30345 Plug (175) 0020-30354 Finger (2) 0020-30362 Top ring, SXTAL 200 mm (1) 0020-30382 Cap nut, Top mount (2) 0020-30395 Bolt (1) 0020-30396 Nut (1) 0020-30397 Stud (1) 0020-30398 Clamp (20) 0020-30401 Support, Susceptor arm (3) 0020-30402 Support arm, Top mount (4) 0020-30408 Aluminum screw (1) 0020-30418 Ring, Top (2) 0020-30456 Cover back lamp 8" prsp (15) 0020-30477 Leveling bar (3) 0020-30482 Coupling, Flex 8" oxide (2) 0020-30483 Clamp ring, 200mm (2) 0020-30485 Sensor flange modif. (1) 0020-30486 Sensor cap, Modified (1) 0020-30511 Manifold, Water (3) 0020-30566 Clamp ring (1) 0020-30602 Pumping plate, 200mm BWCVD (4) 0020-30628 Clamp ring, Vespal (16) 0020-30656 Screw (5) 0020-30670 Pickup (1) 0020-30701 Insert (1) 0020-30710 Ring, Clamp (2) 0020-30723 Cylinder (2) 0020-30813 Insert (1) 0020-30869 Tuning rod (1) 0020-30870 Tuning sleeve (2) 0020-30885 Sleeve (1) 0020-30886 Washer (2) 0020-30888 Washer (2) 0020-30893 Retainer hoop finger (1) 0020-30909 Foam insulator (1) 0020-30914 Screw (1) 0020-30949 Pedestal cover (1) 0020-30977 Flange, Top lid (2) 0020-30983 Plate, Pumping (12) 0020-30984 Plug, Pedestal (2) 0020-30988 Adaptor, Top cover (4) 0020-30999 Centering tool, 100mm (6) 0020-31008 Insert (1) 0020-31016 Housing, Quartz tube (1) 0020-31016 Housing, Quartz tube bwcvd (4) 0020-31019 Perf. Plate, 200 mm (5) 0020-31019 Perf. Plate, 200 mm (5) 0020-31020 Blocker plate (9) 0020-31020 Blocker plate (1) 0020-31035 Manifold, Input BWCVD (4) 0020-31132 Aluminum screw (1) 0020-31147 Insert base, 150-200mm (2) 0020-31154 Seal, Sleeve bellows (67) 0020-31252 Finger (2) 0020-31253 Flag (3) 0020-31275 Plug dc (3) 0020-31288 Top lid adapter (1) 0020-31293 Wall, Left chamber ASP (1) 0020-31294 Wall, Right chamber ASP (4) 0020-31296 Screw (1) 0020-31299 Housing (4) 0020-31304 Insert, Outer (7) 0020-31304 Insert, NI ,Outer 200 mm poly (2) 0020-31343 Gas distribution plate (1) 0020-31388 Cylinder, 4-6" (9) 0020-31401 Screw (1) 0020-31425 Mixer gas box (2) 0020-31461 Pedestal cover (5) 0020-31461 Pedestal cover (2) 0020-31493 Gas distribution plate, 133 holes (1) 0020-31499 Cover endpoint detector (24) 0020-31501 Finger, Chuck, 200 mm ASP (1) 0020-31505 Shower head (2) 0020-31506 Shower head (1) 0020-31507 Shower head (2) 0020-31510 Pedestal (1) 0020-31530 Housing, TV (1) 0020-31534 Flange, Throttle valve universal chamber (1) 0020-31536 Gas distribution plate (3) 0020-31556 Bezel, Filler (17) 0020-31570 Lift pin (18) 0020-31619 Strap connecting, 150 mm ceramic (2) 0020-31627 Flange, Base ESC (1) 0020-31630 Insulator, Bottom DC contact esc (2) 0020-31632 Carrier, ESC (2) 0020-31632 Carrier, ESC (1) 0020-31638 Cover (3) 0020-31651 Centering pin (2) 0020-31658 Clamp ring, 200mm (9) 0020-31659 Cover, Vespal (24) 0020-31660 Bracket, Symmetrical (8) 0020-31660 Bracket, Symmetrical (2) 0020-31661 Bracket, Symmetrical coil side (8) 0020-31662 Bracket, Clamp (10) 0020-31662 Bracket, Clamp (29) 0020-31663 Bracket, Lower coil (9) 0020-31663 Bracket, Lower coil (5) 0020-31667 Screw (5) 0020-31692 FTG, Elbow gas feed, Unibody (4) 0020-31740 Screw, Vespel (2) 0020-31797 Gas plate, 61 holes .156 thick (2) 0020-31804 Gas plate, 200 mm (1) 0020-31820 Gas distribution plate (1) 0020-31833 Hinge, Bracket (1) 0020-31834 Hinge, Pivot metch (1) 0020-31835 Panel, Heated turbo converter (1) 0020-31855 Heat sheild, Throttle valve (6) 0020-31874 Panel, Shield A & C position system control (1) 0020-31874 Panel, Shield A & C position system control (8) 0020-31901 Cover (1) 0020-31940 Pedestal, AL 200 mm (1) 0020-31940 Pedestal, AL 200 mm (1) 0020-31940 Pedestal, AL 200 mm (6) 0020-31998 Pedestal, 200mm, AL , Notch, Finger (4) 0020-32009 Strip, Cathode (1) 0020-32011 Plate (81) 0020-32049 Cap, Vespal (1) 0020-32148 Showerhead (1) 0020-32163 Cover, Bottom pedestal ESC (2) 0020-32165 ESC, Cover (1) 0020-32262 Gas distribution plate (45) 0020-32314 Lift shim, Teos (3) 0020-32320 Gas distribution plate (1) 0020-32325 Strap enclosure (1) 0020-32326 Capacitor mount (7) 0020-32407 Lift pin (1) 0020-32431 Connector clamp (1) 0020-32837 Hinge (2) 0020-32939 Bracet, LLC 29 slot (3) 0020-32983 Shim (4) 0020-33015 Bearing (36) 0020-33023 Bearing (3) 0020-33044 Bearing (1) 0020-33096 Cover, Gas feed R2 (1) 0020-33100 Plug, Manometer port, R2 (14) 0020-33339 Hinge, Inner (52) 0020-33341 Cap, RF (1) 0020-33355 Shaft hinge (2) 0020-33363 Plug, Gas feed (1) 0020-33374 Insulator, Holder (1) 0020-33405 Plate (1) 0020-33803 Foot pad, Upper (1) 0020-33816 Isolator, RF bulkhead DPS (50) 0020-33897 Window clear, Dynasil 1000 (20) 0020-33900 Shim, 200 mm (1) 0020-33936 Housing (2) 0020-34033 HE block, Base MXP+ (21) 0020-34038 Contact retainer (5) 0020-34050 Guide, Wing (10) 0020-34054 Screw, Captive fixture (9) 0020-34055 Screw, Captive (1) 0020-34113 Insulator, Pedestal (2) 0020-34130 Lift pin (1) 0020-34140 Gas distribution plate (1) 0020-34142 Chamber lid (1) 0020-34142 Chamber lid (1) 0020-34299 Flange, Insulation unibody .400THK (2) 0020-34307 Plenum, RPS (21) 0020-34309 Bracket, Sensor (1) 0020-34368 Plate (6) 0020-34555 Washer (3) 0020-34571 Cap off (1) 0020-34630 Stand, Liquid injection (1) 0020-34682 Lever, Ratchet DxZ (1) 0020-34731 Lid, Pumping plate (1) 0020-34731 Lid, Pumping plate (1) 0020-34739 Storage base (2) 0020-34749 Carrier, ESC (2) 0020-34755 Insert (2) 0020-34775 Blocker, Perf silox 200 mm universal CH (3) 0020-34776 Screw (1) 0020-34828 Encoder (5) 0020-34831 Plate, Mounting RF/HV w/interlock (2) 0020-34935 Gas distribution plate (23) 0020-34977 Isolator wafer lift resistor (7) 0020-34985 Pul TMG belt 1/5 pitch (2) 0020-35048 Platform, Cassette 200mm (1) 0020-35138 Cassette stage, Plated (6) 0020-35237 Screw, Pivot (1) 0020-35712 O-ring (1) 0020-36049 Panel, Convenience outlet (1) 0020-36749 Clip (2) 0020-36835 Bracket (1) 0020-37066 Bracket, H2 sensor (1) 0020-38062 Insert support (1) 0020-38065 Cover (4) 0020-38327 Coil (2) 0020-38752 Lift pin (1) 0020-38808 Bottom fan connector bracket (1) 0020-38849 Bracket, View window, Poly DPS (1) 0020-38923 Endpoint, Plug (4) 0020-39067 Bracket, Bottom front panel (31) 0020-39501 Screw (1) 0020-39646 Support Bracket, 5200 auto tuner (1) 0020-39684 Coil, DPS poly (2) 0020-39692 Rod (30) 0020-39695 Lift pin (1) 0020-39949 Bracket (12) 0020-40164 Plug (1) 0020-40599 Brace, pump (2) 0020-40942 N2 purge sleeve (15) 0020-40990 Sleeve, Lift pin (5) 0020-40992 Cover plate (7) 0020-41048 Post clamp, Lower (2) 0020-41064 Lifter, 200 mm (8) 0020-41118 Post clamp (4) 0020-41125 Washer (1) 0020-41255 Nut (1) 0020-41263 Aperture (2) 0020-42069 Screw (1) 0020-42099 Plate, WXZ (1) 0020-42102 Shim, Teos lift (1) 0020-42103 Wafer lift, TEOS (1) 0020-42112 Cylinder lift (2) 0020-42162 Sleeve, Copper, Gas tube plug WXZ (1) 0020-42269 Lift ring (16) 0020-42270 Screw (18) 0020-51284 Package type B H/E (1) 0020-51405 Insert (2) 0020-56002 Spacer, Viton (7) 0020-70050 Clamp, Window (1) 0020-70095 Window, Lid 29 position storage elevator (1) 0020-70123 Panel, Electrical I/O EXP GP (1) 0020-70141 Pivot block window bellcrank (1) 0020-70144 Window b, Top 29 position storage elevator (2) 0020-70145 Window, Side 29 position storage elevator (8) 0020-70428 O-ring, Viton (4) 0020-70431 Ring, Rotary seal (57) 0020-70432 Hinge (53) 0020-70433 Hinge (1) 0020-70464 Plate (1) 0020-70608 Vaccum port cover (7) 0020-70610 Screen, Cover, Widebody loadlock (1) 0020-75388 Bracket hinge, Top left 29 pos storage elevator (1) 0020-75791 Cover (4) 0020-75907 Hub ,Lamp feed thur (1) 0020-76000 Flap, Throttle (1) 0020-76000 Flap, Throttle (14) 0020-76006 Button, Delrin cassette handler (2) 0020-76042 Bushing 200 mm wafer cassette handler (1) 0020-76062 Shaft robot drive (1) 0020-76067 Shaft, Lower left arm robot (4) 0020-76094 Pin (1) 0020-76096 Spacer set 2 robot drive (1) 0020-76097 Spacer set 3 robot drive (1) 0020-76159 Bracket (1) 0020-76169 Cover (2) 0020-76183 Door, Slit valve metal etch (5) 0020-76184 Channel chamber tray (2) 0020-76436 Screw, Tee (1) 0020-76449 Bracket MTG short manifold fac I/F centura (1) 0020-76474 Bracket, Gen rack connector plate (1) 0020-76690 Mount, Door (1) 0020-76733 Cap (8) 0020-76863 Hinge, Block outer bottom (1) 0020-76909 Blade (6) 0020-78346 Strip (1) 0020-78709 Gimbal rod (4) 0020-78711 Clamp (14) 0020-78796 Support pad (1) 0020-79091 Wafer ring (1) 0020-81549 Spacer (1) 0020-89991 Supprt wire (2) 0020-92560 Screw (3) 0020-95175 Gasket, Graphite (2) 0020-98329 Clamp, Plate (8) 0021-00043 RF shield cover (5) 0021-00098 Bushing, DPS throttle valve (14) 0021-00098 Housing, Busing throttle, DPS 5.50" st (3) 0021-00488 Cover (1) 0021-01285 Reflector (1) 0021-01550 Pin, Ceramic (1) 0021-01730 Lid, Muli slot cooldown (2) 0021-02951 Shaft (1) 0021-03878 Flap, Anodized (3) 0021-04249 Inner cup coil, Support electra (2) 0021-06923 Clamp, Base, Flex gasline DZ IHC (1) 0021-06924 Clamp (4) 0021-08612 Pedestal cover (1) 0021-09016 Wafer transfer lid, MXP+ (18) 0021-09069 Sleeve (6) 0021-09070 Washer (16) 0021-09097 Plate, Alignment (2) 0021-09098 Separation ring (1) 0021-09426 Bracket, AL recessed endpoint (1) 0021-09458 Houisng, Inner cooling (1) 0021-09592 Plate (1) 0021-09594 Clamp (1) 0021-09724 Strap, RF (42) 0021-09771 Screw, Vespel (1) 0021-09780 Thermal foil (26) 0021-09836 Gasket (3) 0021-09836 Gasket (1) 0021-09875 Collar ring, Showerhead 200 mm (4) 0021-09956 Handle (2) 0021-10019 Cover, Bolt, Thin Ped, ESC (5) 0021-10134 Sleeve, Extended (4) 0021-10140 Door, Slit valve (8) 0021-10418 Plate (1) 0021-10585 TC Plate ASP (5) 0021-10634 Plug, Throttle valve universal chamber (1) 0021-10642 Feedthru, HE Housing (1) 0021-10642 Feedthru, HE Housing (1) 0021-10693 Insert, Slit valve (4) 0021-10797 Clamp, Outer cooling coil (5) 0021-11098 Support cushion (1) 0021-11297 Cover, Outer clamp (4) 0021-12323 Clamp (10) 0021-18193 Flag, Heater lift producer SE (5) 0021-18226 Upper hard stop (2) 0021-18674 Dome cover (1) 0021-20042 Shutter disk (1) 0021-20744 Bracket, DC blankoff (2) 0021-21054 Bracket (3) 0021-21312 Clamp fedthru coil support (3) 0021-21504 Shield (1) 0021-21910 Clamp ring, 200 mm snnf sst (1) 0021-22107 Blade, Transfer 150 mm HP+ SMF (6) 0021-22229 Clamp (3) 0021-30486 Sensor cap (3) 0021-35023 Screw (2) 0021-35095 Oxide clamp carrier, 5200 (6) 0021-35095 Oxide clamp carrier, 5200 (1) 0021-35130 Carrier (1) 0021-35168 Panel (1) 0021-35706 Clamp, Dome (4) 0021-35793 Shadow ring (1) 0021-35829 Plate, Adaptor, TC MTG, ASP (3) 0021-35970 Cup, RF Match (9) 0021-35987 RF strap, TXZ MCVD (1) 0021-36006 Plate (3) 0021-36086 Reflector, Lamp (1) 0021-36151 Connector, RF feedthr DTCU, DPS (1) 0021-36152 Tube, RF feedthru, (1) 0021-36154 Adapter, RF feedthru, DTCU, DPS Poly (1) 0021-36198 Block exhaust port DCSXZ (2) 0021-36302 Blocker plate (5) 0021-36675 Block, Rf rod (13) 0021-36678 Auto bias (1) 0021-36686 Window (1) 0021-36889 Bracket (1) 0021-37029 Manifold (1) 0021-37053 Bracket, Endpoint window (1) 0021-37053 Bracket, Endpoint window (6) 0021-37053 Bracket, Endpoint window (16) 0021-37085 Pin, Interlock DPS (4) 0021-37188 Adapter poly line (2) 0021-37290 Ceramic, CVD (2) 0021-38052 Sleeve, Cassette handler (2) 0021-38106 Bracket, Teos line 3 (1) 0021-38137 Protection cover (20) 0021-38742 Centering ring (2) 0021-38828 Bearing (2) 0021-38875 Gasket (1) 0021-70220 Deposition ring (1) 0021-76026 Deposition ring (1) 0021-76309 Cover, Det adjustable, Fast wafer mapping (2) 0021-76346 Cover, Lead screw HT ESC (5) 0021-77542 Support pad (1) 0025-97961 Heater (50) 0030-00169 Clip, Pedestal (50) 0030-00171 Stop, Upper (360) 0030-00173 Clip (44) 0030-00186 Stop, Upper oxide (50) 0030-00192 Upper, Stop (134) 0030-00193 Button (28) 0030-00196 Seal, Large face 200 mm (100) 0030-00207 Stop, Upper 150 mm oxide (100) 0030-00208 Lower, 150 mm oxide (624) 0030-00209 Upper, 125 mm oxide (100) 0030-00210 Lower, 125 mm oxide (72) 0030-00212 Bottom wafer (46) 0030-00217 Screw cover (32) 0030-00242 Screw cover (96) 0030-01005 Spacer (6) 0030-01007 Cover (10) 0030-01018 Support overlay (22) 0030-01019 Ovlay (2) 0030-09023 Tray elevator 150 mm (1) 0030-09026 Tray, Elevator 200 mm (2) 0030-09036 O-ring, Chemraz GT P/N 5641-0108-SC513 (6) 0030-09037 Seal , Chemraz # 5641-0438-SC513 (1) 0030-09048 O-ring, Chemraz (3) 0030-09051 O-ring, Chemraz (7) 0030-09052 O-ring, Chemraz # 5641-0481-SC512 (3) 0030-09055 O-ring, Chemraz # 5641-0449-SC513 (49) 0030-09065 O-ring, Chemraz # 5641-0498-SC513 (8) 0030-09066 O-ring, Chemraz # 5641-0481-SC513 (42) 0030-09373 O-ring (2) 0030-35004 O-ring (40) 0030-60028 Wafer clip (1) 0030-70044 Slit valve, Mount door (1) 0030-70055 Chamber body, Wafer orienter (1) 0030-70085 Bezel (3) 322420060 Active alumina/H026000 (2) 0035-00034 Crank (1) 0040-00181 Load rough line (1) 0040-00248 Port screen, Turbo pump (1) 0040-00332 Can, Sealing right (1) 0040-00366 Screen ease (4) 0040-00375 Left shoe pick-up (3) 0040-00405 Weldment (4) 0040-00456 Fiber optic cable (2) 0040-00457 Fiber optic cable (1) 0040-00514 Mounting bracket (1) 0040-00543 Tube, Mounting (2) 0040-00572 Mounting bracket clamp (2) 0040-01004 Tube, Telescope (2) 0040-01149 Bracket, Mounting magnet terminal block (1) 0040-04210 Clip, Box mount (1) 0040-06380 Plate (2) 0040-09020 Exhaust duct, Gas panel (4) 0040-09022 Weldment housing (1) 0040-09069 Cable, Assy, (1) 0040-09096 Vacuum port / Slit window hinge support (2) 0040-09096 Vacuum port / Slit window hinge support (1) 0040-09222 Bracket motor (Tune) (1) 0040-09255 Pedestal, 200mm (2) 0040-09264 Plate, Cover expanded RS-232 (1) 0040-09308 Plate, Susceptor (2) 0040-09341 Screen, Turbo (1) 0040-09407 Weldment (1) 0040-09559 Shelf, Deionizer tank modified (3) 0040-09652 Duct enclosure (10) 0040-09668 Weldment bellows (2) 0040-09686 Bracket, Gate valve PCB (1) 0040-09817 Heater weldment, WXZ 150 mm (1) 0040-09944 Bellows (1) 0040-11026 Shaft (1) 0040-13083 Front bracket, Turbo controller (1) 0040-18021 Nozzle (2) 0040-20048 Feed thru, Lamp (1) 0040-20048 Feed thru, Lamp (3) 0040-20048 Feed thru, Lamp (1) 0040-20142 Weldment, Filter JSK (1) 0040-20223 Dome, Preclean (3) 0040-20330 Support (1) 0040-20378 Bellows (4) 0040-21151 Bellows, Push rod (1) 0040-21170 Clamp (2) 0040-21342 Collimator (2) 0040-21464 Lift hoop, Modified (1) 0040-21985 Bracket (1) 0040-22488 Screw (1) 0040-23104 Frame, G-12 w/side water injection (1) 0040-23466 Blankoff DC connector (1) 0040-31889 Shield, left R2 (5) 0040-31985 Bellows (2) 0040-32029 Plate, Match cover expanded RS-232 (1) 0040-32409 Vent, Plate (8) 0040-32424 Block parter (3) 0040-32426 Bushing (1) 0040-32436 Tuning Elements, Assy. (2) 0040-32462 Bracket (1) 0040-32677 Clamp, Roller catch (1) 0040-35343 Bellows (1) 0040-35888 Weldment (1) 0040-36031 Weldment, Heater 200 mm (1) 0040-36303 Base, Heater DCSXZ (1) 0040-36758 Applicator, ASP, Lower heat exchange (1) 0040-37050 Heater weldment (1) 0040-37333 Bracket (1) 0040-37606 Gas manifold, CVD AL (1) 0040-39077 Plate (1) 0040-39678 Heater (1) 0040-39723 Plate, Universal (2) 0040-70270 SWLL, Lt. Side wafer (1) 0040-76001 Weldment post cover cassette handler (2) 0040-76184 Bracket, Potentiometer modified (2) 0040-76419 Block, Sensor centura mf (2) 0040-94763 Shoe pick-up, 200 mm (7) 0050-09022 Extension, Short arm, Vac. Line (5) 0050-09032 Tube, N2 purge (1) 0050-09057 Tube weldment, Cap man (4) 0050-09057 Weldment, CVD chamber (3