中古 AMAT / APPLIED MATERIALS Carina etch chamber for Centura #9109896 を販売中

12" Chamber materials: Advanced ceramic Lid materials: AG 1000 Process ring: QUARTZ Single ring Plasma exposed chamber oring: Kalrez Cathode temperature range: 130°C to 250°C Carina etch swap kit: 1 Chamber viewport: Standard viewport Endpoint type: Eyed IEP CCM Cover: No Flow ratio controller: FRC Gas line configuration: Gas type 1: HEATED BCL3  MFC 1 Size: 400 SCCM Gas type 2: CL2 MFC 2 Size: 200 SCCM Gas type 3: CL2 MFC 3 Size: 30 SCCM Gas type 4: HBR MFC 4 Size: 400 SCCM Gas type 5: HEATED SICL4 Gas type 6: NF3  MFC 6 Size: 200 SCCM Gas type 7: CHF3 MFC 7 Size: 400 SCCM Gas type 8: O2 MFC 8 Size: 200 SCCM Gas type 9: HEO2 (70/30) MFC 9 Size: 50 SCCM Gas type 10: N2 MFC 10 Size: 100 SCCM Gas type 11: AR MFC 11 Size: 300 SCCM Gas type 12: CF4 MFC 12 Size: 300 SCCM Gas type 13: SF6 MFC 13 Size: 100 SCCM Gas type 14: HE MFC 14 Size: 400 SCCM 2012 vintage.