中古 AMAT / APPLIED MATERIALS (4) Chambers for Centura DxZ #9248579 を販売中

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ID: 9248579
(2) Chambers with interconnects and gas panel Chamber 1: Chamber assembly No process kit SiH4 Nit Gas pallet RFG 2000-2V RF Match Foreline assembly EV Manifold Tray board assembly AC Tray assembly AI/O DIO board Interface board Slit valve assembly Gas panel seriplex assembly Gas pane EV Manifold Umbilical cable Heater driver Chamber 2: Chamber assembly No process kit SiH4 Nit Gas pallet Foreline assembly EV Manifold Tray board assembly AC Tray assembly AI/O DIO Board Interface board Slit valve assembly Gas panel seriplex assembly Gas pane EV Manifold Umbilical cable Heater driver Chamber 3 and 4: Chamber assembly (No process kit) Missing parts in chamber 2.
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