中古 ROTH & RAU XXL #9117922 を販売中

PECVD System Environmental conditions: Temperature: 22°C-25°C Relative humidity: 30%-50% (Non condensing) Process gas: Silane SiH4 4.0 200 sccm per MFC 4 ¼" Ammoniac NH3 3.8 1000 sccm per MFC 5 ¼” Nitrogen N2 5.0 2000 sccm per MFC 2 ¼" 10000 sccm per MFC 1 auf N2 calibrated ¼" Stirring gas and ventilation gas Name: Nitrogen Formula: N2 Pureness: 2.8 (Technical quality) Inlet pressure device: 6-7 bar Connection value (max. value): 1085 l/min Average consumption: 735 l/min Connection fitting with internal thread ½" Inlet pressure purging function gas cabinet 2 bar Inlet pressure valve control gas cabinet 5 bar Inlet pressure for pressure storage Lock chamber ventilation 4 bar Compressed air Quality: Oil content 0,01 mg/m³ (Oil and water-free) Particle size: < 0.1 μm Particle concentration: < 0.1 mg / m³ Working pressure: 6-7 bar Connection fitting with internal thread 1/2" Consumption (in average at cycle time): 111 l/min Connection (max. value): 111 l/min Cooling water: Quality: Water hardness range “soft” less than 1.5 Millimol calcium carbonate per liter (Equals 8.4°dH) PH Value: 7-9 Foreign particle size: < 0.2 mm Dissolved chlorine Cl: < 20 mg/l Dissolved carbon dioxide CO2: < 10 mg/l Pressure flow: 4-6 Bar Pressure spread p flow-outlet 3 bar Temperature flow: 18°C < 22°C ( T 5K flow-outlet) Consumption: 326 l/min Connection feed and outlet: 2”- Fitting (External thread) Power supply: Connected voltage: 3 x 400 V ± 5 %+N+PE / 50 Hz Electrical total load: 460 kVA 2008 vintage.