中古 RENA Sodi-Um #171454 を販売中

Inline Texture Etching Machine, 5" - 6" Specifications: Wafer production rate: approximately 1400 wafers 156mm x 156mm per hour Material Processed: Poly Silicon Wafers (Multi Crystalline Silicon) Process: Detergent washing, Etching and drying Wafer Size processing capability: 125mm and/or 156mm Square (5) transport lanes for all wafer sizes Operates from left to right in respect to the operator Distance between roller: 48mm Transport speed between .5M/min to 1.5M/min Cartridge carriage through the process Voltage: 480V/60Hz Number Drives: 4 Air Knife/ ACD: Air Knife Number Pumps: 6 Type of Machine: InTex Generation: c Standard / HT: Standard Workflow: R to L Process: UKN Lanes: 5 Metrohm: Yes, Online Chiller: UC 150 UPS: Supply HF-sensors: Dräger Encoder: f.Automation (1x) Type of Drain: Gravity Cascade: Twice Connections: Chemicals backside bottom other on top Centering Line Without 2.roller set Transport Height: 1000mm Wellentyp: Roller with border Modul 1: HF/HNO3-bath, RT-2066148 Modul 2: Rinse + Alkaline clean RT-2066031 Modul 3: Rinse RT-2059580 Modul 4: Acidic clean RT-2065975 Modul 5: Rinse RT-2059458 Modul 6: Dryer RT-2059486 Crated 2008 vintage.