中古 VEECO / EMCORE K465i #9043779 を販売中

MOCVD-GaN system, 6" K-MOCVD K465i GaN MOCVD reactor VEECO TURBODISC - K465i GaN MOCVD Reactor Cart Assembly - K465i GaN: 1099755-1001 K465i GaN growth chamber K465i Uniform Flow Flange assembly Water-cooled Turbodisc susceptorless spindle rotation system including integrated errofluidic rotation mechanism Reactor temperature management system including water to water heat exchanger with temperature flow and water level alarms Water cooled baseplate assembly MFC purged eight position viewport for in-situ measurements Mechanical switch gauge for over pressure monitoring Veeco K465 Heater Assembly Proprietary heater filament Three zone resistive heater assembly High temperature heat shields, insulators, and electrical feedthroughs Wafer Handling Assembly - K465i GaN: 1095778-4202 Laminar Flowhood Integrated laminar flowhood wafer loading platform for easy wafer loading Growth Chamber Exhaust System (Exhaust to Top) 1.5" exhaust line Ebara ESA-25D process pumps Manual and pneumatic ball valves High capacity particle filter assembly Leak detector port Electronic pressure transducer Reactor pressure control throttling valve Overpressure protection via switch gauge User Interface - Swing Arm: 1094894-3001 (2) Monitors Keyboard/Mouse Ergonomic Swing Arm Attached to Tool Rotary Transfer Assembly - K465i GaN: 1094841-2001 High vacuum aluminum transfer chamber with viewports Single modular dwell station with 2-carrier capacity Pneumatically controlled, interlocked rectangular L-VAT door for isolation between growth chamber and transfer chamber Vacuum robot with end effector for wafer carrier transfer Pressure measurement of loadlock chamber Mechanical switch gauge for overpressure monitoring Electronics Control Module - K465i GaN: 1091932-4213 (8) DC power supplies for heater power Digital devices on industry-standard DeviceNet digital network Software integrated with Omron PLC Standardized cables and interconnects Capable of facilities UPS (customer supplied) H2 Detector included Circuit Breaker Panel 380 VAC - K465i GaN: 1091831-4004 Source Delivery and Reactor Housing Module - K465i Custom Configuration - 1093574-**** Modular Reconfigurable Gas Panel Includes: Supply Gas Regulator Slices Hydride Dopants Vaccum/Vent Leak Check Assembly Supply Gas Assembly Hydride / Shroud Assembly Flow Panel with Injector Block Phantom Line option Bubbler Slices Temperature Regulating Liquid Baths Bubblers Manifold Type: Dual Switching (Nitrogen & Hydrogen) Process module custom characteristics listing Reactor Interface Flowpanel - K465i Direct Inject Hydride System Metal sealed source mass flow controllers Alkyl injector block phantom MFC option Supply Gas Sub-Assembly GaN Standard: 2xN2, 1xH2 regulator, 2 N2/H2 Manual valve slice with switch gauge & regulator Label NH3 Supply Gas Subassembly - Slice #2 Manual valve slice with switch gauge & regulator Supply Gas Subassembly - Slice #4 Manual valve slice with switch gauge & regulator Option for SiH4 or Si2H6 or H2Se or H2S Supply Gas Subassembly - Slice #5 Empty Gas Source - Slice #3 Dilution with isolation valve, dual push gas Option for SiH4 or Si2H6 Bubbler Slice Position #1 Empty Bubbler Slice Position #2 Configuration Bubbler #2: TMAl Slice#2: Dilution, dual gas feed, single bubbler Multi-Valve High-Purity Welded Manifold. Metal Sealed Mass Flow controller(s). Metal Sealed Integrated Pressure Controller(s). Integrated Spool piece for Binary Gas Monitor. Bubbler Slice Position #3 Configuration Bubbler #3: TEGa Slice#3: Standard, dual gas feed, single bubbler Multi-Valve High-Purity Welded Manifold. Metal Sealed Mass Flow controller(s). Metal Sealed Integrated Pressure Controller(s). Integrated Spool piece for Binary Gas Monitor. Bubbler Slice Position #4 Configuration Bubbler #4: TMGa Slice#4: Standard, dual gas feed, single bubbler Multi-Valve High-Purity Welded Manifold. Metal Sealed Mass Flow controller(s). Metal Sealed Integrated Pressure Controller(s). Integrated Spool piece for Binary Gas Monitor. Bubbler Slice Position #5 Configuration Bubbler #5: TMGa Slice#5: Standard, dual gas feed, single bubbler Multi-Valve High-Purity Welded Manifold. Metal Sealed Mass Flow controller(s). Metal Sealed Integrated Pressure Controller(s). Integrated Spool piece for Binary Gas Monitor. Bubbler Slice Position #6 Configuration Bubbler #6: Customer Specified Slice#6: Standard, dual gas feed, single bubbler Multi-Valve High-Purity Welded Manifold. Metal Sealed Mass Flow controller(s). Metal Sealed Integrated Pressure Controller(s). Integrated Spool piece for Binary Gas Monitor. Bubbler Slice Position #7 Configuration Bubbler #7: Cp2Mg Slice#7: Standard, dual gas feed, single bubbler Multi-Valve High-Purity Welded Manifold. Metal Sealed Mass Flow controller(s). Metal Sealed Integrated Pressure Controller(s). Integrated Spool piece for Binary Gas Monitor. Bubbler Slice Position #8 Configuration Bubbler #8: TMIn Slice#8: Standard, dual gas feed, single bubbler Multi-Valve High-Purity Welded Manifold. Metal Sealed Mass Flow controller(s). Metal Sealed Integrated Pressure Controller(s). Binary Gas Monitor. Bubbler Slice Position #9 Configuration Bubbler #9: TMIn Slice#9: Standard, dual gas feed, single bubbler Multi-Valve High-Purity Welded Manifold. Metal Sealed Mass Flow controller(s). Metal Sealed Integrated Pressure Controller(s). Binary Gas Monitor. Liquid Refrigerator Baths - Quantity = 4 Water cooled version Model Lauda 215 Operating temperature range: -30 degrees C to 200 degrees C. Adjustable over-temperature protection. Bath cavity dimensions: 8.5" x 8.5" x 9.8" Liquid Refrigerator Baths - Quantity = 2 Water cooled version Model Lauda 235 Operating temperature range: -30 degrees C to 200 degrees C. Adjustable over-temperature protection. Bath cavity dimensions: 13.8" x 11.8" x 9.8" In-Situ Monitoring System 1096010-1036 (1) RealTemp 200 Monitoring System - Quantity Combined pyrometer and reflectometer unit to enable Emissivity Corrected temperature measurement and control. Accurate reflectance and temperature measurement of individual wafers. (2) DRT-210 Real-time In-situ Monitoring Systems Integrated Deflectometer, Reflectometer, and Thermometer to monitor: Curvature of Epi-wafer Layer Thickness and Refractive Index Wafer Pocket Temperature with Wafer Reflection Compensation Integrated Electronics Assembly Dedicated computer and In-Situ Interface Controller Advanced software package for data analysis. High Speed Data Acquisition for Wafer Differentiation Auto Start/Stop integrated with Veeco’s RecipeX Software. Wafer Carrier for K465i GaN (2) Veeco P/N 1200232 5 X 6" Consumables Kit 1093608-1004 Install-Phase consumable parts Gaskets, o-rings, screws, nuts, washers 1/8" SS Bubbler Legs - Quantity = 8 sets Server PC for Nexus Datalogging (Rackmount) - 1094416 NEXUS Control & Monitoring Software - 1094417 Nexus includes: Spreadsheet Recipe generation Capable of nested recipes Reduced complexity Easy editing - Excel style Easy porting from system to system Automatic Calculations simplifying Injector block parameters Bubbler parameters - minimize source material use Operator Interface One button execution Variety of selectable monitoring functions Customer user-defined privileges Maintenance Automatic Paretos redictive maintenance Remote Access Via LAN Data Management Access to data files by date or run Data manipulation / viewing of all parameters Industrial-Grade Server Advantech AIMB-766G2 Core 2 Quad, Q9400, 2.66GHz RAM, 240pin DIMM, DDR2, 2GB HDD, 250GB, SATA II Enterprise CD/DVD RW DRIVE Windows Server 2003, Web Edition Systems utilize shared scrubber. The scrubber is not included CE Mark 2010 vintage.