中古 VEECO / EMCORE E450 #9363532 販売用

ID#: 9363532

メーカー:

VEECO / EMCORE

モデル:

E450

カテゴリー:

REACTORS

機器の詳細:

System
Wafer capacity: Up to 48"

Group III MO sources:
(2) TMGa
(2) TMIn
(2) TMAl

Group V hydride sources:
(2) AsH3
PH3

Dopants MO:
CP2Mg
CBr4

Dopants hydride: H2/SiH4
(2) NESLAB Baths

(7) Lorex piezocons
2-Channels for TMI expendable to 4 (For 2 additional TMG)
EBARA A70W Pump

Exhaust system:
(2) Particle filters
Housing

Phosphorus trap
P-Trap automatic regeneration system loadlock: Loadlock chamber
Glove box
Moisture monitor
Wafer carrier transfer robotic system heater

(3) Heater elements:
Inner
Middle
Outer graphite heater temperature control

Temperature monitor 3-point T/C
YOKOGAWA Controller
3-Point SEKIDENKO pyrometer

Gas monitoring:
Gas leak monitor
Toxic gas
H2 Gas monitor system

Epi Windows 2000.
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