中古 NOVELLUS Speed #9218973 を販売中

System (2) Chambers System configuration: Mainframe: NOVELLUS C2 DLCM-S Pet, 8" CRT Monitor Local control: Module controller Communication network: ARCnet LAN Chamber A & B Position: NOVELLUS C2 SPEED-S Process module Transfer module: DLCM-S PET Fab interface: Standard GEM Interface Host interface: SECS DLCM PET Interface type: Tool controlled PET Dual-Load lock Cassette Module (DLCM): Loadlock chamber: Type: Shrink body integrated with PET Loadlock assy: Left & Right Left loadlock: IOC #2 Right loadlock: IOC #3 Cassette present sensor Auto rotation Loadlock slit valve o-ring type: Viton Indexer controller: CE T2 Indexer robot Gauge: 275 mini convectron Gas: Nitrogen Transfer chamber sensor PEC Station No wafer out of cassette detector Integrated cassette sensor Transfer chamber: MKS Baratron Loadlock Robot: BROOKS Mag 7 Robot blade: CERAMIC / Metal Robot arm type: (2) BROOKS Arm robots Load lock door: Open / Close sensor indicator Wafer on blade detector N2 Vent purge valve He purge MFC Type: BROOKS Throttle valve: MKS Dedicated transfer turbo pump: PFEIFFER TMH 260 DLCM Inert gas lines: N2 Supply CDA Supply He supply SPEED Chamber A & B Configuration: Type: NOVELLUS C2 SPEED-S Process module Frequency type: Dual HF + LF ADVANCED ENERGY RFG 5500 High frequency RF generator ADVANCED ENERGY PDX 5000 Low frequency RF generator Top match: TRAZAR SRN 1-2 Pedestal RF Match: TRAZAR AMU1OE-2 27-118072-00 Dome type: Standard/G10 Pressure switch sensor: VACUUM Switch PV48W-84 Gate valve: VAT Module controller system: MC1 / MC3 MFC Type: BROOKS Gas feed: Multi-line drop Gas 1 MFC 1: Ar 500sccm Gas 2 MFC 2: O2 500sccm Gas 3 MFC 3: NF3 1000sccm Gas 4 MFC 4: SiH4 200sccm Gas 5 MFC 6: SIF4 200sccm Gas 6 MFC 8: H2 2000sccm Gas 7 UPC1: H2 2000sccm Gas line in connect fitting: VCR Nickel coated ESC Type: Duratek-IC 8", semi Temperature probes and controller: NTM 500 C / 500 D Turbo pump type: MAG W 2200 Manometer type 10 torr: MKS Manometer type 100m toor: MKS Throttle valve: MKS Type Endpoint detector: VERITY SD2048DL Clean method: Toggle clean Clean gas: NF3 SPEED USG Process kit: CERAMIC Guard ring CERAMIC Process injector tube: 4.13'' Nozzle CERAMIC Clean injector tube: NOVELLUS CERAMIC Lift pin: NOVELLUS Turbo pump screen: Normal screen Pedestal height: 1.75'' SPEED FSG Process Kit CERAMIC Guard ring CERAMIC Process injector tube: 2.5'' Nozzle CERAMIC Clean injector tube: NOVELLUS CERAMIC Lift pin: NOVELLUS Turbo pump screen: Louver screen Pedestal height: 2.75" PEC Type: E-PEC Plate SPEED Calibration unit and jig: Black body calibration: CI SR40 / SR72 NOVELLUS OEM Dome jig NOVELLUS OEM Turbo jump jig Facilities: SSD: NOVELLUS OEM Power supply: 3 Phase, 208V UPS.