中古 NOVELLUS Sabre XT #9028619 を販売中

Electro Chemical Deposition (ECD) system, 12" Install Type: Stand-Alone SEMI S2-93A & CE Marking Compliance Cassette Interface: (2) 300mm 25-slot FOUP Load-Ports Auto Wafer/Cassette Mapping Wafer Center Find 4-Axis Wafer Handling Robot (ATM) with vacuum pick Mini-Environment (Class 1 HEPA), Hunt Air System Main Unit: SS Backbone & Enclosure Polyester Powder Coat Paint Finish Cover Panels Status Lamp (R/Y/G/B) – FI Mounted Front-side User Interface (UI) 2.0mm plating edge exclusion (requires full coverage barrier/seed) Bath Control Module: Metering of (3) bath additives DI & fresh plating solution Bath Chemistry control algorithm (Smart Dose), corrects for additive decomposition Central bath reservoir for plating modules 2nd Containment (Splash Guards & Leak Detection) (3) Plating modules: Copper Anodes (4N) Field Shaping Elements Anode Chambers & Membranes Plating Cells (minimize copper effluent) Pulse Plating Power Supply Flat Thickness distribution profile kit 0.05um Final Filters Dual Waste Stream Plumbing: Dedicated plating solution reclaim Dilute rinse water waste stream Pentium Computer/Controller Chase Computer GUI-Based controlling software SECS/GEM SW – Proteus Active Top Hat Options: Bevel Etch for all (3) SRDs: On-board Chemical Dilution/Mix unit (200mm ver) CMS Readiness Kit Manuals (Std & CR versions) may be avail. with tool at time of sale Customer Engineering Specials (CESs): CES PTC 40269A – 75’ Heater/Chiller Cables CES PTC 40228A – ½ Height EMO CES PTC 40230A – Light Tower Label CES PTC 40231A – DI Shut Off CES PTC 40234A – Door with Rounded Corner CES PTC 40237A – LOTO Label CES PTC 40250A – SRDX Container Cover CES PTC 40248A – Label Power Box CES PTC 40224B – Hermos Lot ID CES PTC 40292A – Dosing Door CES PTC 40291A – Power Box Captive Screws CES PTC 40290A – Neslab Main TB Removal CES PTC 40289A – SRD Controller Ground Wire CES PTC TBD - SAC CES PTC 40311A – FM 4910 Material ( 4 Items ) CES PTC 40312A – FM 4910 Material Tertiary Containment Tray CES PTC 40311B – FM 4910 Windows CES PTC 40320A – FM 4910 Panels CES PTC TBD - FM 4910 ( Internal ) Cost Estimate Supporting Equipment: (1) Neslab Heat Exchanger/Chiller Neslab Cable Kit (35ft) Chemicals / Gases used with tool: ENTHONE VIAFORM MAKEUP LA CUBATH VIAFORM SUPPRESSOR, ACCELERATOR, LEVELER COPPER (GENERIC) SILVER NITRATE SOLUTION (0.01N-0.3N) SODIUM HYDROXIDE, 1 N REAGENT QUALICHEM CU, CU REAGENT 2 SULFURIC ACID 98% VLSI GRADE HYDROGEN PEROXIDE 30% UHP Facility Connections: Drain: Bottom fed Exhaust: Top fed Facility Requirements: CDA Water (Chilled Tap & DI) Vacuum Power: 208VAC, 120A, 3-Phase, Freq 60Hz 2003 vintage.