中古 NOVELLUS CONCEPT 2 Speed #9093692 を販売中

CVD, HDP System, 8". Wafer shape: Flat SMIF Interface: No PET Module: Yes Aligner option: No System main power: 208 V, 50/60 Hz, 3 phase, 5 wires 3-Phase full load current: 10 amps Max component current: 5 amps System UPS Power: Yes Silt valve insert: No Silt valve type: SMC L-Motion TM Turbo pump bodel: Pfeiffer TMH260 TM Throttle valve model: MKS TM Baratron model: MKS Loadlock baratron model: MKS IOC Version: V 4.1 TM Robot type: Mag 7 TM Robot blade: Ceramic Wafer sensor: Existence Signal tower: Yes EMO's: Push button Module controller: MC1 Host interface: SECS Front monitor: LCD Monitor MFC1, Ar/He, 1 SLM, Brooks 5964 MFC2, Ar/He, 1 SLM, Brooks 5964 MFC3, Ar/H2, 500 Sccm, Brooks 5964 Sys con: C2-SCON-6582 Signal cable Chase computer Module A, B, and C: Chamber type: Shrink Chamber process: ILD Process clean type: In situ Module controller: MC1 Module turbo pump: Pfeiffer TPH2101 PCX Manometer 1 (10 T): MKS Throttle valve: MKS ESC / Dome cooling: PCW Temp monitoring: NTM500C Manometer 2 (10 T): MKS HF Generator: AE RFG5500 LF Generator: AE PDX 5000 RF Match: Trazar AMU10E-2 Manometer 3 (100 m): MKS IOC Version: 4.2 Dual clean injector kit: Yes Injector type: Single Louvered screen: No Pedestal lift type: Dual position Foreline type: Standard NF3, 1 slm, Aera FC-D980C Ar, 500 sccm, Aera FC-D980C O2, 500 sccm, Aera FC-D980C H2, 2 slm, Aera FC-D980C HE, 500 sccm, Aera FC-D980C SiH4, 200 sccm, Aera FC-D980C Deinstalled 2005 vintage.